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In Situ, Real-Time Curvature Imaging During Chemical Vapor Deposition

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Abstract

Coherent Gradient Sensing (CGS) is a full-field optical technique that produces real-time images of macroscopic wafer curvature, which, for thin films, can be related to stress through Stoney’s equation. Here we describe the use of CGS as an in situ diagnostic to observe film stress distributions during chemical vapor deposition. The application of this method to measure oxygen diffusion rates in thin film YBa2Cu3O6+δ (YBCO) and stresses in thin film PbxBa1-xTiO3 (PBT) under chemical vapor deposition (CVD) conditions will be discussed.

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Acknowledgements

This work has been supported by DARPA/NSF grant number DMS-9615858 and ARO MURI grant number DAAD 19-01-1-0517.

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Authors and Affiliations

  1. Division of Engineering and Applied Science, California Institute of Technology, Pasadena, CA, 91125, USA

    David A. Boyd, Ashok B. Tripathi, Mohamed El-Naggar & David G. Goodwin

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  1. David A. Boyd
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  2. Ashok B. Tripathi
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  3. Mohamed El-Naggar
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  4. David G. Goodwin
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Boyd, D.A., Tripathi, A.B., El-Naggar, M. et al. In Situ, Real-Time Curvature Imaging During Chemical Vapor Deposition. MRS Online Proceedings Library 795, 374–379 (2003). https://doi.org/10.1557/PROC-795-U5.31

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  • DOI: https://doi.org/10.1557/PROC-795-U5.31

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