Abstract
Experiments were carried out to determine the cooling power density of SiGe/Si superlattice microcoolers by integrating thin film metal resistor heaters on the cooling surface. By evaluating the maximum cooling of the device under different heat load conditions, the cooling power density was directly measured. Both micro thermocouple probes and the resistance of thin film heaters were used to get an accurate measurement of temperature on top of the device. Superlattice structures were used to enhance the device performance by reducing the thermal conductivity, and by providing selective emission of hot carriers through thermionic emission. Various device sizes were characterized. The maximum cooling and the cooling power density had different dependences on the micro refrigerator size. Net cooling over 4.1 K below ambient and cooling power density of 598 W/cm2 for 40 × 40 μm2 devices were measured at room temperature.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
R. Venkatasubramanian, E. Siivola, T. Colpitts, and B. O'Quinn, Nature 413, 597–602 (2001).
H. J. Goldsmit, Thermoelectric Refrigeration (Plenum, New York, 1964).
J. B. Vining, J. Appl. Phys. 69, 331–341 (1991).
A. Shakouri and J. E. Bowers, Appl. Phys. Lett., 71, 1234 (1997).
A. Shakouri, C. LaBounty, P. Abraham, J. Piprek, and J. E. Bowers, Mater. Res. Soc. Symp. Proc. 545, 449 (1999).
A. Shakouri and J. E. Bowers, in The 16th International Conference on Thermoelectrics, Dresden, Germany, 26-29 Aug. 1997, p. 636–40.
A. Shakonri, C. LaBounty, P. Abraham, J. Piprekt, J. E. Bowers, in The Next Generation Materials for Small-Scale Refrigeration and Power Generation Applications Symposium, Boston, MA, USA 30 Nov.-3 Dec. 1998, p. 449–58.
G. D. Mahan and L. M. Woods, Physical Review Letters 80, 4016–19 (1998).
C. B. Vining and G. D. Mahan, Journal of Applied Physics 86, 6852–3 (1999).
L. D. Hicks and M. S. Dresselhaus, Physical Review B (Condensed Matter) 47, 12727–31 (1993).
L. D. Hicks, T. C. Harman, and M. S. Dresselhaus, Applied Physics Letters 63, 3230–2 (1993).
T. Koga, X. Sun, S. B. Cronin, and M. S. Dresselhaus, Applied Physics Letters 73, 2950–2 (1998).
T. Koga, X. Sun, S. B. Cronin, and M. S. Dresselhaus, Applied Physics Letters 75, 2438–40 (1999).
T. Koga, S. B. Cronin, M. S. Dresselhaus, J. L. Liu, and K. L. Wang, Applied Physics Letters 77, 1490–2 (2000).
F. Xiaofeng, Z. Gehong, C. LaBounty, J. E. Bowers, E. Croke, C. C. Ahn, S. Huxtable, A. Majumdar, and A. Shakouri, Applied Physics Letters 78, 1580–2 (2001).
F. Xiaofeng, Z. Gehong, E. Croke, G. Robinson, C. LaBounty, A. Shakouri, J. E. Bowers, in The 7th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, Las Vegas, NV, USA 23-26 May 2000, p. 304–7.
Z. Gehong, A. Shakouri, C. L. Bounty, G. Robinson, E. Croke, P. Abraham, F. Xiafeng, H. Reese, and J. E. Bowers, Electronics Letters 35, 2146–7 (1999).
H. J. Osten, Journal of Applied Physics 84, 2716–21 (1998).
B. L. Stein, E. T. Yu, E. T. Croke, A. T. Hunter, T. Laursen, A. E. Bair, J. W. Mayer, and C. C. Ahn, in The 24th Conference on the Physics and Chemistry of Semiconductor Interfaces Research, Triangle Park, NC, USA 12-15 Jan. 1997, p. 1108–11.
C. LaBounty, A. Shakouri, G. Robinson, P. Abraham, and J. E. Bowers, in The 18th International Conference on Thermoelectrics, Baltimore, MD, USA 29 Aug.-2 Sept. 1999, p. 23–6.
C. LaBounty, A. Shakouri, and J. E. Bowers, Journal of Applied Physics 89, 4059–64 (2001).
J. Christofferson, D. Vashaee, A. Shakouri, P. Melese, F. Xiaofeng, Z. Gehong, C. Labounty, J. E. Bowers, and E. T. Croke, III, in The 17th Annual IEEE Semiconductor Thermal Measurement and Management Symposium, San Jose, CA, USA 20-22 March 2001, p. 58–62.
L. Coldren and S. Corzine, Diode Lasers and Photonic Integrated Circuits (John Wiley & Sons, Inc., New York, 1995).
C. LaBounty, Ph. D. Thesis, University of California, Santa Barbara, 2001.
D. Vashaee, A. Shakouri, C. Labounty, G. Zeng, X. Fan, J. E. Bowers, and E. T. Croke, III, manuscript in preparation.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Zeng, G., Fan, X., LaBounty, C. et al. Cooling Power Density of SiGe/Si Superlattice Micro Refrigerators. MRS Online Proceedings Library 793, 124–130 (2003). https://doi.org/10.1557/PROC-793-S2.2
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-793-S2.2