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Fabrication and characterization of in-situ grown epitaxial Ba1-xSrxTiO3 composition spreads

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Abstract

We have used our combinatorial pulsed laser deposition system to in-situ fabricate epitaxial Ba1-xSrxTiO3 thin film composition spreads on (100) LaAlO3 substrates. Multimode quantitative microwave microscopy was used to perform dielectric characterization of the spreads at multiple microwave frequencies simultaneously. Systematic variation in dielectric properties as a function of composition is studied. The multi-mode measurements allow frequency dispersion studies. We observe strong composition-dependent dielectric dispersion in Ba1-xSrxTiO3.

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Chang, K.S., Aronova, M., Famodu, O. et al. Fabrication and characterization of in-situ grown epitaxial Ba1-xSrxTiO3 composition spreads. MRS Online Proceedings Library 700, 36 (2001). https://doi.org/10.1557/PROC-700-S3.6

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  • DOI: https://doi.org/10.1557/PROC-700-S3.6

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