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Multiple Quantum NMR Study of Hydrogen Clustering in Amorphous Silicon

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Abstract

Because Multiple Quantum NMR coherences occur only between spins which are coupled together by the dipole interaction, this technique has been used to study the clustering of hydrogen in amorphous silicon. The clustered hydrogen was found to be associated with the broad line of the single quantum NMR spectra. For device quality films, the average cluster size is approximately six protons. The concentration of these five to seven atom defects increases with increasing hydrogen content until, at very high hydrogen content, the clusters are replaced by a continuous network of silicon-hydrogen bonds.

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Authors and Affiliations

  1. Department of Chemical Engineering, University of California, Berkeley, CA, 94720, USA

    Karen K. Gleason & J. A. Reimer

  2. Department of Chemistry, University of California, Berkeley, CA, 94720, USA

    J. Baum & A. Pines

  3. Code 6120, Naval Research Laboratory, Washington DC, 20375-5000, USA

    A. N. Garroway

Authors
  1. Karen K. Gleason
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  2. J. Baum
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  3. A. N. Garroway
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  4. A. Pines
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  5. J. A. Reimer
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Gleason, K.K., Baum, J., Garroway, A.N. et al. Multiple Quantum NMR Study of Hydrogen Clustering in Amorphous Silicon. MRS Online Proceedings Library 70, 83–88 (1986). https://doi.org/10.1557/PROC-70-83

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  • DOI: https://doi.org/10.1557/PROC-70-83

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