Accurate Determination of the Elastic properties of Near Surface Regions and Thin Films Using Nanoindentation and Acoustic Microscopy

Abstract

Nanoindentation has been successfully used as a mechanical properties microprobe to characterise the elastic properties of materials. However, in an isotropic material it is not possible to measure the two independent elastic constants by nanoindentation. Normally, a value of Young’s modulus is determined using an assumed value for Poisson’s ratio. It is also possible to use the acoustic microscope in its z-contrast mode to measure the elastic constants of a surface. This too produces a composite measurement of the elastic properties, which can be represented in terms of Young’s modulus and Poisson’s ratio. By using both techniques on the same sample area, it is possible to make two independent measurements of the elastic properties and thus determine both Young’s modulus and Poisson’s ratio. This method has been used on well-characterised bulk materials, e.g. silica glass, to demonstrate that it produces consistent results. It has also been uused to characterise thin films of TiN/NbN multilayers. These results show that, although for thin films there is a need to improve the analysis of the mechanics, the combination of nanoindentation and acoustic microscopy shows promise.