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Oxidation of Molybdenum Thin Films and its Impact on Molybdenum Field Emitter Arrays

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Abstract

Oxidation of emitter surfaces can be a serious problem for Mo field emitter arrays. We studied the oxidation and related changes in the electronic properties of Mo thin films as a function of annealing temperature. Experiments were done on Mo thin films prepared on Si and sodalime glass substrates. These films were thermally oxidized and characterized using a variety of techniques including x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), ultraviolet photoelectron spectroscopy (UPS), and thermal desorption spectroscopy (TPD) methods. For films oxidized below 400°C, partial oxidation was observed, with MoO3(110) being the principal oxide phase. However, at a temperature of 500°C and above, oxidation of the film was complete. Electrical characteristics of the films undergo a rapid transition from semiconductive to highly insulating at temperatures between 475 to 500°C. Temperature programmed desorption spectra showed that the oxides are stable at elevated temperature with only a principal O2 desorption peak at approximately 786°C.

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References

  1. I. Brodie and P.R. Schwoebel, Proc. IEEE 82, 1005 (1994).S.J. Kwon, K.J. Hong, J.D. Lee

    Article  Google Scholar 

  2. C.W. Oh, J.S. Yoo and Y.B. Kwon, J. Vac. Sci. Technol. B18, 1227 (2000).

    Google Scholar 

  3. Y. Wei, B.R. Chalamala, B.G. Smith, and C.W. Penn, J. Vac. Sci. Technol. B17, 233 (1999).

    Article  Google Scholar 

  4. S. Itoh, T. Niiyama, M. Yokoyama, J. Vac. Sci. Technol. B11, 647 (1993).

    Article  Google Scholar 

  5. B.R. Chalamala, D. Uebelhoer, and R.H. Reuss, Rev. Sci. Instrum. 71, 320 (2000).

    Article  CAS  Google Scholar 

  6. R.S. Archer, Chapter 16 in Rare Metals Handbook, C.A. Hampel, Ed., New York: Reinhold Pub. Corp., 1961.

  7. For reference data for Mo and MoOx, refer to J. Phys. Chem. Ref. Data 14, 1509 (1985).

  8. J.-G. Choi and L.T. Thompson, Appl. Surf. Sci. 93, 143 (1996).

    Article  CAS  Google Scholar 

  9. Reference data: Alfa Aesar Catalog, Johnson Matthey Co., p. 477 (1999).

  10. D.E. Eastman, Phys. Rev. B2, 1 (1970).

    Google Scholar 

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Authors and Affiliations

  1. Motorola, Inc., Semiconductor Products Sector, 2100 E. Elliot Road, Tempe, AZ, 85284, USA

    Babu R. Chalamala, Robert H. Reuss & Yi Wei

  2. Department of Physics, University of North Texas, Denton, TX, 75203, USA

    John M. Bernhard, Edward D. Sosa & David E. Golden

  3. Department of Material Science, University of Maryland, College Park, MD, 20742, USA

    Sanjeev Aggarwal & R. Ramesh

Authors
  1. Babu R. Chalamala
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  2. Robert H. Reuss
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  3. Yi Wei
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  4. John M. Bernhard
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  5. Edward D. Sosa
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  6. David E. Golden
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  7. Sanjeev Aggarwal
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  8. R. Ramesh
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Chalamala, B.R., Reuss, R.H., Wei, Y. et al. Oxidation of Molybdenum Thin Films and its Impact on Molybdenum Field Emitter Arrays. MRS Online Proceedings Library 685, 1421 (2001). https://doi.org/10.1557/PROC-685-D14.2.1

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  • DOI: https://doi.org/10.1557/PROC-685-D14.2.1

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