Abstract
The laser-assisted chemical vapor deposition (LCVD) technique has proved to be an effective means of depositing cadmium sulfide layers in a well-controlled manner over select small areas. Observations of favorable conditions for deposition and typical pitfalls in the process are discussed. Analysis of the LCVD CdS layers is presented in conjunction with comparisons to conventionally grown CdS layers. The stoichiometry, thickness, and grain structure of the LCVD CdS layers have been suitably optimized for use in solar-cell applications.
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Hixson, J.L., Cassidy, C.S., Stewart, R.L. et al. Fabrication of Solar-Cell-Quality Cadmium Sulfide Layers Via Laser-Assisted Chemical Vapor Deposition (LCVD). MRS Online Proceedings Library 668, 84 (2000). https://doi.org/10.1557/PROC-668-H8.4
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DOI: https://doi.org/10.1557/PROC-668-H8.4