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High Frequency Thin Film Acoustic Ferroelectric Resonators

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Abstract

Both ZnO and PZT Thin Film Bulk Acoustic Resonator filters were fabricated, tested and modeled in this study. The development of an accurate Mason model allows the effect of particular parasitic components on the microwave s-parameters in the region of the series and parallel resonances to be identified. The parasitic components that limit the performance of our ZnO and PbZr0.3Ti0.7O3 Thin Film Bulk Acoustic Resonator filters are analysed. From an analysis of PbZr0.3Ti0.7O3 Thin Film Bulk Acoustic Resonator measurements values for the longitudinal acoustic velocity and electromechanical coupling coefficient can be derived. Measured PbZr0.3Ti0.7O3 Thin Film Bulk Acoustic Resonator filter responses confirm that the larger electromechanical coupling coefficients in this material compared to ZnO give wider filter band-widths.

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References

  1. K.M. Lakin, G.R. Kline, K.T. McCarron, IEEE Trans. Microwave Theory and Techniques, vol. 43 (12), Dec. 1995.

  2. Y. Miyasaki, S. Hoshino, S. Takahashi, 1987 Ultrasonics Symposium, 385–393.

  3. L. Mang, F. Hickernell, R. Pennell, T. Hickernell, 1995 IEEE MTT-S Digest, 887–890

    Google Scholar 

  4. A. Yamada, C. Maeda, T. Sato, T. Umemura, F. Uchikawa, K. Misu, S. Wadaka, Integrated Ferroelectrics, vol 22, p353–361 (1998)

    Article  Google Scholar 

  5. Y. Yoshino, S. Iwasa, H. Aoki, Y. Deguchi, Y. Yamamoto, K. Ohwada, Mat. Res. Soc. Proc. Vol.441, 241–246 (1997).

  6. Z. Huang, Q. Zhang and R.W. Whatmore, J. Applied Physics, 85(10), 7355–7361, (1999)

    Article  CAS  Google Scholar 

  7. C.T. Lynch, Handbook of Materials Science, vol. 1 General Properties, CRC, Cleveland (1974).

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Authors and Affiliations

  1. Nanotechnology and Microsystems group, School of Industrial and Manufacturing Sciences, Cranfield University, Cranfield, Bedford, MK43 0AL, UK

    Paul Kirby, Qing-Xin Su, Qi Zhang & Roger Whatmore

  2. Telecom Technology Development Centre, TDK Corporation, 2-15-7, Higashi-Ohwada, Ichikawa-shi, Chiba, 272-8558, Japan

    Eiju Komuro & Masaaki Imura

Authors
  1. Paul Kirby
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  2. Qing-Xin Su
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  3. Eiju Komuro
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  4. Masaaki Imura
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  5. Qi Zhang
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  6. Roger Whatmore
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Kirby, P., Su, QX., Komuro, E. et al. High Frequency Thin Film Acoustic Ferroelectric Resonators. MRS Online Proceedings Library 655, 171–176 (2000). https://doi.org/10.1557/PROC-655-CC13.7.1

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  • DOI: https://doi.org/10.1557/PROC-655-CC13.7.1

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