Skip to main content
SpringerLink
Log in

SOI Formation from Amorphous Silicon by Novel Gain Enhancement Method

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Large grain (> 10 um) poly-Si film has been formed from nickel Metal Induced Lateral Crystallization (MILC) and subsequent high temperature annealing. The fabricated thin film transistors (TFT) have near SOI performance. The new technology has good potential to provide low cost SOI substrates, multi-layer devices and other novel applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. S.W. Lee, Y.C. Jeon and S.K. Joo, Appl. Phys. Lett.66 (13), pp.1671–1673 (1995).

    Article  CAS  Google Scholar 

  2. S.W. Lee, S.K. Joo, IEEE Electron Device Letters17, No. 4, pp. 160–162 (1996).

    Article  CAS  Google Scholar 

  3. Z. Jin, G.A. Bhat, M. Yeung, H.S. Kwok and M. Wong, J. Appl. Phys.84, No. 1, pp. 194–200 (1998).

    Article  CAS  Google Scholar 

  4. G.A. Bhat, Z. Jin, H.S. Kwok and M. Wong, IEEE Electron Device Letters20, No. 2, pp. 97 (1999).

    Article  CAS  Google Scholar 

  5. V. Subramanian and K.C. Saraswat, IEEE Trans. Elecron Devices45, No.9, pp.1934–1939, 1998.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, Hong Kong University of Science & Technology, Sai Kung, Hong Kong

    C. Y. Yuen, M. C. Poon, M. Chan, M. Qin, W. Y. Chan, S. Shivani & P. K. Ko

Authors
  1. C. Y. Yuen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. C. Poon
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Chan
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Qin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. W. Y. Chan
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. Shivani
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. P. K. Ko
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yuen, C.Y., Poon, M.C., Chan, M. et al. SOI Formation from Amorphous Silicon by Novel Gain Enhancement Method. MRS Online Proceedings Library 587, 82 (1999). https://doi.org/10.1557/PROC-587-O8.2

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-587-O8.2

Search

Navigation