Abstract
Thin films of zinc sulfide (ZnS) doped with Mn, were deposited using magnetron sputter source. The electroluminescent properties of the as-deposited films were relatively poor. Post-deposition rapid thermal annealing (RTA) with and without co-dopants was studied. Significant changes in microstructure and EL performance were observed on the samples after post-sputter processing. Transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM) were employed to characterize the microstructure. Both inter-grain and intra-grain distributions of the co-dopants were measured using energy dispersive X-ray spectra (EDX) and the distribution versus thickness was determined by dynamic secondary ion mass spectrometry (SIMS). A correlation between electroluminescent properties and the microstructure is obtained.
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Zhai, Q., Li, J., Lewis, J. et al. Effects of Co-Dopants on the Microstrucutre and El Properties of the ZnS∶Mn Luminescence Materials. MRS Online Proceedings Library 560, 21–26 (1999). https://doi.org/10.1557/PROC-560-21
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DOI: https://doi.org/10.1557/PROC-560-21