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a-Si TFTs on Thin Steel Foil Substrates: How Thin Can We Go?

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Abstract

The mechanics of thin film-substrate couples indicates that mechanical stress in the active electronic layer can be reduced when films are deposited onto thinner substrates. To explore the question of just how thin a substrate can be, a-Si:H TFTs are fabricated on thin steel foil substrates of various thickness, and performance metrics from devices on each of the substrates are measured and compared.

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References

  1. E. Ma and S. Wagner, in Flat-Panel Display Materials - 1998, edited by G.N. Parsons, C.C. Tsai, T.S. Fahlen, and C.H. Seager (Mater. Res. Soc. Proc.508, Pittsburgh, PA, 1998), pp.13–18.

    CAS  Google Scholar 

  2. M. Finot and S. Suresh, “Small and Large Deformation of Thick and Thin-Film Mult-Layers: Effects of Layer Geometry, Plasticity and Compositional Gradients,”J. Mech. Phys. Solids 44, (5), 683–721 (1996).

    Article  CAS  Google Scholar 

  3. H. Gleskova, S. Wagner and Z. Suo in Flat-Panel Display Materials - 1998, edited by G.N. Parsons, C.C. Tsai, T.S. Fahlen, and C.H. Seager (Mater. Res. Soc. Proc.508, Pittsburgh, PA, 1998), pp.73-38.

    CAS  Google Scholar 

  4. D. Smith, Thin-Film Deposition: Principles and Practice, (McGraw-Hill, New York, 1995), p.495.

    Google Scholar 

  5. S.D. Theiss and S. Wagner, IEEE Electron Dev. Lett. 17, 571–580 (1996).

    Article  Google Scholar 

  6. S.D. Theiss, C.C Wu, M. Lu, J.C. Sturm, and S. Wagner in Flat Panel Display Materials III, edited by R.T. Fulks, G.N. Parsons, D.E. Slobodin, and T.H. Yuzuriha (Mater. Res. Soc. Proc.471, Pittsburgh, PA, 1997) p.21.

    CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Electrical Engineering, Princeton University, Princeton, NJ, 08540, USA

    Sigurd Wagner

  2. Printed Transistor Inc., 66 Witherspoon St., No. 131, Princeton, NJ, 08542, USA

    Eugene Ma

Authors
  1. Eugene Ma
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  2. Sigurd Wagner
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Correspondence to Eugene Ma.

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Ma, E., Wagner, S. a-Si TFTs on Thin Steel Foil Substrates: How Thin Can We Go?. MRS Online Proceedings Library 558, 381–386 (1999). https://doi.org/10.1557/PROC-558-381

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  • DOI: https://doi.org/10.1557/PROC-558-381

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