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Melting and resolidification dynamics of a-Si and poly-Si thin films during excimer laser annealing

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Abstract

The liquid-solid interface motion and the temperature history of thin Si films during excimer laser annealing are observed by in-situ experiments combining time-resolved (~Ins) electrical conductance, optical reflectance/transmittance at visible and near-IR wavelength, and thermal emission measurements. The existence of partial and complete melting regimes is elucidated. In the partial melting regime, the maximum temperature remains close to the melting point of aSi, since the laser energy is consumed on the latent heat of phase-change. In the complete melting regime, substantial supercooling, followed by homogeneous nucleation is observed. These phase transformations are consistent with the recrystallized poly-Si morphologies.

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References

  1. J.S. Im, R.S. Sposili, and M.A. Crowder, Apply. Phys. Lett. 70, 3434 (1997).

    Article  CAS  Google Scholar 

  2. H.J. Kim and J.S. Im, MRS Symp., Proc., 697, 401 (1996).

    Google Scholar 

  3. G. Aighmayre, D. Toet, M. Mulato, P.V. Santos, A. Spangerberg, S. Chreistiansen, M. Albrecht, and H.P. Strunk, Phy. Stat. sol. (a) 166, 659(1998).

    Article  Google Scholar 

  4. R. Ishihara and M. Matsumura, Jpn. J. Appl. Phys. 36, 6167 (1998).

    Article  Google Scholar 

  5. G. Groos nad M. Stutzmann, J. Non-Crystal solids 227, 938 (1998).

    Article  Google Scholar 

  6. V.V. Gupta, H.J. Song, and J.S. Im, Apply. Phus. Lett. 71, 99 (1997).

    Article  CAS  Google Scholar 

  7. R.F. Wood and G.A. Geist, Phys. Rev., Lett. 57, 873 (1986).

    Article  CAS  Google Scholar 

  8. S.R. Stiffeler and M.O. Thompson, Phys. Rev., Lett. 60, 2519 (1988).

    Article  Google Scholar 

  9. E.E. Jellison, D.H. Lowndes, D.N. Mashburn, and R. F. Wood, Phys. Rev. B 26 2111(1986).

    Google Scholar 

  10. X. Xu, R.E. Russo, and C.P. Grigoropoulos, Appl. Phys. A 62, 51 (1996).

    Article  Google Scholar 

  11. S.J. Moon, M.H. Lee, M. Hatano, K. Suzuki, and C.P. Grigoropoulos, to be published SPIE.

  12. V.M. Galzov, S.N. Chizhevskays, and N.N. Glagoleva, Liquid semiconductor, Plenum, New York (1969).

    Book  Google Scholar 

  13. K. Murakami, O. Eryu, K. Takita, and K. Masuda, Phys. Rev., Lett. 59, 2519 (1987).

    Article  Google Scholar 

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Authors and Affiliations

  1. Central Research Laboratory, Hitachi Ltd., Tokyo, 185-8601, Japan

    Mutsuko Hatano

  2. Department of Mechanical Engineering, University of California, Berkeley, CA, 94720, USA

    Mutsuko Hatano, Seungjae Moon, Minghong Lee & Costas P. Grigoropoulos

  3. Electron Tube & Devices Division, Hitachi Ltd., Mobara, 297, Japan

    Kenkichi Suzuki

Authors
  1. Mutsuko Hatano
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  2. Seungjae Moon
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  3. Minghong Lee
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  4. Kenkichi Suzuki
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  5. Costas P. Grigoropoulos
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Hatano, M., Moon, S., Lee, M. et al. Melting and resolidification dynamics of a-Si and poly-Si thin films during excimer laser annealing. MRS Online Proceedings Library 558, 193–198 (1999). https://doi.org/10.1557/PROC-558-193

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  • DOI: https://doi.org/10.1557/PROC-558-193

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