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Low Dielectric Constant Fluorocarbon Films

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  1. Chemical Engineering Department, MIT, Cambridge, MA, 02139, USA

    K. K. S. Lau & K. K. Gleason

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Lau, K.K.S., Gleason, K.K. Low Dielectric Constant Fluorocarbon Films. MRS Online Proceedings Library 544, 209–220 (1998). https://doi.org/10.1557/PROC-544-209

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