Abstract
We have investigated the structure of α-Si:H thin films using variable coherence transmission electron microscopy. Variable coherence is a new microscopy technique that is sensitive to higher-order atomic position correlations. We observe changes in the structure of α-Si:H with increasing hydrogen content and with light soaking. Based on these observations we conclude that a less ordered form of α-Si:H is more structurally stable than a more ordered form. This may have implications for understanding the Staebler-Wronski effect.
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Acknowledgement
We wish to thank Margaret Bisher for technical assistance. Work by some University of Illinois participants was supported by the National Science Foundation (DMR 97-03906).
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Gibson, J.M., Treacy, M.M.J., Voyles, P.M. et al. Changes in the Medium Range Order of α-Si:H Thin Films Observed by Variable Coherence Tem. MRS Online Proceedings Library 507, 837–842 (1998). https://doi.org/10.1557/PROC-507-837
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DOI: https://doi.org/10.1557/PROC-507-837