Abstract
The microstructural and luminescence properties of europium doped yttrium oxide (Y2O3:Eu) thin films deposited by metallorganic chemical vapor deposition are presented in this work. It was found that surface morphology, crystallinity and photoluminescent emission properties are strongly dependent on substrate temperature during deposition. The depositions were carried out in a stainless steel chamber using yttrium and europium 2,2,6,6,-tetramethyl-3,5-heptanedionates as volatile precursors and O2 as the reactant gas. Post-annealing increased the crystallite size and decreased the lattice parameter, resulting in an increased photoluminescent emission intensity.
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Acknowledgments
This work was conducted under the auspices of the US Department of Energy, supported (in part) by funds provided by the University of California for the conduct of discretionary research by Los Alamos National Laboratory under project CULAR and the Visiting Scholar Program. Technical assistance by I. Gradilla, E. Aparicio and A. Tiznado is gratefully acknowledged.
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Hirata, G.A., McKittrick, J., Yi, J. et al. Microstructural and Photoluminescence Studies on Europium Doped Yttrium Oxide Films Synthesized by Metallorganic Vapor Deposition. MRS Online Proceedings Library 495, 39–43 (1997). https://doi.org/10.1557/PROC-495-39
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DOI: https://doi.org/10.1557/PROC-495-39