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Step Contours in the Development of Periodically Modulated Vicinal Surfaces

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Abstract

The connection between the atomic step distributions and decay modes of modulated surfaces is the focus of this paper. We have examined the arrangements of atomic steps on real 1- and 2-D periodic structures by scanning tunneling microscopy(STM) and low energy electron microscopy(LEEM) and have followed their development at temperature by LEEM. The steps present on the surface due to small ‘miscuts’ from exact singular planes can have major effects on both the mechanisms of shape development and the actual shapes that result. Major differences exist in the modes of development between 1- and 2-D periodic step arrays. Some of these observations have led us to a method for producing arrays of step-free Si(001) regions that may have application in device processing.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Cornell University, Ithaca, NY, 14853, USA

    S. Tanaka, C. C. Umbach & J. M. Blakely

  2. IBM T.J. Watson Research Center, Yorktown Heights, NY, 10598, USA

    R. M. Tromp & M. Mankos

Authors
  1. S. Tanaka
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  2. C. C. Umbach
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  3. J. M. Blakely
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  4. R. M. Tromp
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  5. M. Mankos
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Tanaka, S., Umbach, C.C., Blakely, J.M. et al. Step Contours in the Development of Periodically Modulated Vicinal Surfaces. MRS Online Proceedings Library 440, 25–30 (1996). https://doi.org/10.1557/PROC-440-25

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  • DOI: https://doi.org/10.1557/PROC-440-25

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