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High Resolution Electron Microscopy of Sputter-Deposited Zirconia-Alumina Nanolaminates

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Abstract

High resolution electron microscopy is employed to study the crystallography and morphology of zirconia nanocrystallites in zirconia-alumina nanolaminates and zirconia films. Unity volume fraction of tetragonal zirconia formed when the zirconia layer thickness was less than 6.2 nm, a theoretically predicted critical size for tetragonal-to-monoclinic zirconia (t -> m-ZrO2) transformation. In thicker layers, monoclinic zirconia formed, accompanied by renucleation and void formation which caused roughness to the zirconia nanolayers. The average position of the voids in the layers was 6.3 nm from the growth interface, coinciding with the critical dimension for t -> m-ZrO2 transformation.

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Acknowledgments

Work support under U.S. ARO Grant Nos. DAAH04-93-G-0238 and DAAH04-95-1-0242, NSF Grant Nos. DMR-9553148 and BIR-9413762, and by gift from the Johnson Controls Foundation to the Wisconsin Distinguished Professorship of CRA. Useful discussions with M.D. Wiggins are acknowledged.

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Authors and Affiliations

  1. Department of Physics and the Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 413, Milwaukee, WI, 53201, USA

    M.A. Schofield & M. Gajdardziska-Josifovska

  2. Materials Department and the Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 784, Milwaukee, WI, 53201, USA

    R. Whig & C.R. Atta

Authors
  1. M.A. Schofield
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  2. R. Whig
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  3. C.R. Atta
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  4. M. Gajdardziska-Josifovska
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Schofield, M., Whig, R., Atta, C. et al. High Resolution Electron Microscopy of Sputter-Deposited Zirconia-Alumina Nanolaminates. MRS Online Proceedings Library 403, 297–301 (1995). https://doi.org/10.1557/PROC-403-297

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  • DOI: https://doi.org/10.1557/PROC-403-297

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