Skip to main content
SpringerLink
Log in

Silicon Surface Chemistry By IR Spectroscopy in the Mid- To Far-IR Region: H2O And Ethanol On Si(100)

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

The technique of external reflection infrared (IR) spectroscopy is used to study silicon surface chemistry. External reflection is enhanced by implanting a buried cobalt silicide layer in silicon to act as an infrared reflector. The preparation of clean well-ordered surfaces from the ion implanted substrates is demonstrated. The reactions of water and ethanol with Si(100) are investigated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. V. M. Bermudez, J. Vac. Sci. Technol. A 10, 152 (1992); (b) M. McGonigal, V. M. Bermudez, and J. E. Butler, J. Elec. Spec. Rel. Phen. 54/55, 1033 (1990).

    Article  CAS  Google Scholar 

  2. W. Erley, R. Bute, and S. Mantl, Surf. Sci 248, 193 (1991); (b) S. Mantl and H. L. Bay, Appl. Phys. Lett. 61, 267 (1992); The CoSi2 layer is prepared in this paper by a deposition process.

  3. Y. J. Chabal, M. A. Hines, and D. Feijóo, J. Vac. Sci. Technol. A 13, to be published.

  4. A E. White, K. T. Short, R. C. Dynes, J. P. Garno, and J. M. Gibson, Appl. Phys. Lett. 50, 95 (1987); (b) R. Hull, A. E. White, K. T. Short, and J. M. Bonar, J. Appl. Phys. 68, 1629 (1990).

  5. G. S. Higashi, Y. J. Chabal, G. W. Trucks, and K. Raghavachari, Appl. Phys. Lett 56, 656 (1990).

    Article  CAS  Google Scholar 

  6. Y. J. Chabal, Surf. Sci. 168 594 (1986).

    Article  CAS  Google Scholar 

  7. G. P. Williams, Int. J. Infrared Millimeter Waves 5, 529 (1984); (b) G. P. Williams, Nucl. Instrum. Methods A 291, 8 (1990); (c) G. P. Williams, Rev. Sci. Instrum. 63, 1535 (1992).

    Article  Google Scholar 

  8. H. Ibach, H. Wagner, and D. Bruchmann, Solid State Comm. 42, 457 (1982); (b) F. Stucki, J. Anderson, G. J. Lapeyre, and H. H. Farrell, Surf. Sci. 143, 84 (1984).

    Article  CAS  Google Scholar 

  9. Y. J. Chabal and S. B. Christman, Phys. Rev. B 29, 6974 (1984).

    Article  CAS  Google Scholar 

  10. L. M. Struck, et al, manuscript in preparation.

  11. L. L. Tedder, J. E. Crowell, and M. A. Logan, J. Vac. Sci. Technol. A 9, 1002 (1991); (b) L. L. Tedder, G. Lu, and J. E. Crowell, J. Appl. Phys. 69, 7037 (1991).

    Article  CAS  Google Scholar 

  12. K. Edamoto, Y. Kubota, M. Onchi, and M. Nishijima, Surf. Sci. 146, L533 (1984); (b) J. A. Stroscio, S. R. Bare, and W. Ho, Surf. Sci. 154, 35 (1985).

    Article  CAS  Google Scholar 

  13. Z. Ying and W. Ho, Surf. Sci. 198, 473 (1988).

    Article  CAS  Google Scholar 

  14. T. Shimanouchi, Tables of Molecular Vibrational Frequencies. Consolidated Volume I, Nat. Stand. Ref. Data Ser., Nat Bur. Stand. (U.S.) 39 (1972) pp. 104–105; (b) The Sadtler Handbook of Infrared Spectra, (Philadelphia: Sadtler Research Laboratories, 1978) p. 464.

  15. J. Eng Jr., et al, manuscript in preparation.

Download references

Author information

Author notes

  1. L. M. Struck

    Present address: National Institute of Standards and Technology, Gaithersburg, MD, USA

Authors and Affiliations

  1. Department of Chemistry, Columbia University, New York, NY, USA

    L. M. Struck, J. Eng Jr., B. E. Bent & G. W. Flynn

  2. AT&T Bell Laboratories, Murray Hill, NJ, USA

    L. M. Struck, Y. J. Chabal, A. E. White, S. Christman, E. E. Chaban & K. Raghavachari

  3. Brookhaven National Laboratory, Upton, NY, USA

    G. P. Williams

  4. Institut für Schicht-und Ionentechnik, Forschungszentrum Jülich, Jülich, Germany

    K. Radermacher & S. Mantl

Authors
  1. L. M. Struck
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Eng Jr.
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. B. E. Bent
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Y. J. Chabal
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. G. P. Williams
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. E. White
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. Christman
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. E. E. Chaban
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. K. Raghavachari
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. G. W. Flynn
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. K. Radermacher
    View author publications

    You can also search for this author in PubMed Google Scholar

  12. S. Mantl
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Struck, L.M., Eng, J., Bent, B.E. et al. Silicon Surface Chemistry By IR Spectroscopy in the Mid- To Far-IR Region: H2O And Ethanol On Si(100). MRS Online Proceedings Library 386, 395–400 (1995). https://doi.org/10.1557/PROC-386-395

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-386-395

Search

Navigation