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Solid State Reaction of Sputter Deposited Crystalline Multilayers of Ni and Zr

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Abstract

We have prepared sputtered metallic films comprised of alternating layers of pure Ni and Zr to a total thickness of several microns. Due to the negative beat of mixing of crystalline Ni and Zr and a significant intermixing rate we have been able to form an amorphous Ni-Zr phase by a solid state reaction. In this work we report the conditions under which a substantial fraction of amorphous material may be formed. The extent of the reaction itself as a function of time has also been monitored.

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This work is supported under a President’s Fund Grant from the California Institute of Technology.

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Unruh, K.M., Meng, W.J., Johnson, W.L. et al. Solid State Reaction of Sputter Deposited Crystalline Multilayers of Ni and Zr. MRS Online Proceedings Library 37, 551–557 (1984). https://doi.org/10.1557/PROC-37-551

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  • DOI: https://doi.org/10.1557/PROC-37-551

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