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Reactions in Metal-Metalloid Multilayers

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Abstract

We have studied the reactions at metal-metalloid interfaces using high resolution transmission electron microscopy, including in situ observation, and differential scanning calorimetry. There is contrasting behavior depending on the affinity for interaction or segregation. For reactive systems, compound formation ultimately results, but this can be preceded by solid- state amorphization. For non-reactive systems, crystallization of the metalloid is often achieved with nucleation and growth mediated by the metal phase.

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References

  1. T.W. Barbee, Jr. and D.L. Keith, in “Synthesis and Properties of Metastable Phases”, eds. E.S. Machlin and T.J. Rowland (Warrendale, Pennsylvania: Metallurgical Society of AIME, 1980), p.93

  2. J.C. Bravman and R. Sinclair, J. Electron Microsc. Tech. 1 (1984) 53

    Article  CAS  Google Scholar 

  3. K. Holloway and R. Sinclair, J. Appl. Phys., 61 (1987) 1359

    Article  CAS  Google Scholar 

  4. R. Sinclair, Mater. Trans. JIM, 31 (1990) 628

    Article  CAS  Google Scholar 

  5. S. Herd, K. N. Tu and K. Y. Ahn, Appl.Phys.Lett., 42 (1983) 597

    Article  CAS  Google Scholar 

  6. T. Sands, C. C. Chang, A. S. Kaplan, V. G. Keramidas, K. M. Krishnan and J. Washbum, Appl.Phys.Lett., 50 (1987) 1346

    Article  CAS  Google Scholar 

  7. M. Nathan, J. Appl. Phys., 63 (1988) 5534

    Article  CAS  Google Scholar 

  8. J.R. Abelson, K.B. Kim, D.E. Mercer, C.R. Helms, R. Sinclair and T.W. Sigmon, J.AppI.Phys. 63 (1988) 689

    Article  CAS  Google Scholar 

  9. I.J.M.M. Raaijmakers, A.H. Reader and P.H. Oosting, J.Appl.Phys., 63 (1988) 2790

    Article  CAS  Google Scholar 

  10. R. Caron-Popowich, J. Washbum, T. Sands and A. S. Kaplan, J.Appl.Phys., 64 (1988) 4909

    Article  CAS  Google Scholar 

  11. K. Holloway, K. B. Do and R. Sinclair, J.Appl.Phys., 65 (1989) 474

    Article  CAS  Google Scholar 

  12. W. Lur and L.J. Chen, J.Appl.Phys., 66 (1989) 3604

    Article  CAS  Google Scholar 

  13. F. Y. Shiau and Y. A. Chang, Appl.Phys.Lett., 55 (1989) 1510

    Article  CAS  Google Scholar 

  14. K. Holloway and R. Sinclair, J.Less-Common Metals, 140 (1988) 139

    Article  CAS  Google Scholar 

  15. K. Holloway, R. Sinclair and M. Nathan, J. Vac.Sci.Technol., A7 (1989) 1479

    Article  Google Scholar 

  16. I.J.M.M. Raaijmakers and K.B. Kim, J.Appl.Phys., 67 (1990) 6255

    Article  CAS  Google Scholar 

  17. J. Y. Cheng and L. J. Chen, J.Appl.Phys., 68 (1990) 4002

    Article  CAS  Google Scholar 

  18. J. Y. Cheng and L. J. Chen, Appl.Phys.Lett., 56 (1990) 457

    Article  CAS  Google Scholar 

  19. S. Ogawa, T. Kouzaki, T. Yoshida and R. Sinclair, J.AppLPhys., 70 (1991) 827

    Article  CAS  Google Scholar 

  20. L. A. Clevenger, J.Vac.Sci.Technol., A8 (1990) 1566

    Article  Google Scholar 

  21. F.-Y. Shiau, S.-L. Chen, M. Loomans and Y. A. Chang, J.Mater.Res., 6 (1991) 1532

    Article  CAS  Google Scholar 

  22. T. Yamauchi, S. Zaima, K. Mizuno, H. Kitamura, Y. Koide and Y. Yasuda, J.Appl.Phys., 69 (1991) 7050

    Article  CAS  Google Scholar 

  23. J. Y. Cheng and L. J. Chen, J.Appl.Phys., 69 (1991) 2161

    Article  CAS  Google Scholar 

  24. J. Y. Cheng and L. J. Chen, Appl.Phys.Lett., 58 (1991) 45

    Article  CAS  Google Scholar 

  25. K.N. Tu, Phys.Rev.B 43 (1991) 1198

    Article  CAS  Google Scholar 

  26. D.-H. Ko and R. Sinclair, J.Appl.Phys. 72 (1992) 2036

    Article  CAS  Google Scholar 

  27. K. Holloway, Interfacial Reactions in Metal-Silicon Multilayers, PhD thesis, p.119, Stanford University (1989)

    Google Scholar 

  28. R.B. Schwarz and W.L. Johnson, Phys. Rev. Lett. 51 (1983) 415

    Article  CAS  Google Scholar 

  29. TJ. Konno and R. Sinclair, Phil. Mag. B66 (1992) 749

    Article  Google Scholar 

  30. T.J. Konno and R. Sinclair, these proceedings.

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Acknowledgments

Funding for this work is kindly provided by the U.S. National Science Foundation, Grant No. DMR 89-02232. The contributions of Dr. K. Holloway, Dr. D.H. Ko and Dr. S. Ogawa on reactive interfaces are also much appreciated.

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Sinclair, R., Konno, T.J. Reactions in Metal-Metalloid Multilayers. MRS Online Proceedings Library 311, 3–8 (1993). https://doi.org/10.1557/PROC-311-3

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  • DOI: https://doi.org/10.1557/PROC-311-3

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