Skip to main content
SpringerLink
Log in

Detection of Titanium Silicide Formation and Phase Transformation by Picosecond Ultrasonics

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Picosecond ultrasonics is employed to study the titanium silicide formation sequence for evaporated Ti films on silicon substrates annealed at temperatures between 300 and 800 °C. The measurements show significant differences in the ultrasonic echo pattern before and after the structural phases C49 and C54 are formed, thus indicating that picosecond ultrasonics is a sensitive non-destructive probe of silicide formation. The longitudinal sound velocity has been found to be (8.3 ± 0.2) × 105 cm/sec for C49 TiSi2, and about 5% lower for the C54 phase.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G. W. Rubloff, R. M. Tromp, and E. J. van Loenen, Appl. Phys. Lett. 48, 1600 (1986).

    Article  CAS  Google Scholar 

  2. R. Beyers, and R. Sinclair, J. Appl. Phys. 57, 5240 (1985).

    Article  CAS  Google Scholar 

  3. R. J. Nemanich, R. W. Fiordalice, and H. Jeon, IEEE J. Quant. Elect. 25, 997 (1989).

    Article  CAS  Google Scholar 

  4. H. -N. Lin, R. J. Stoner, and H. J. Maris, in IEEE 1990 Ultrasonics Symposium Proceedings, edited by B. R. McAvoy, pp. 1301–1307.

  5. H. T. Grahn, H. J. Maris, and J. Taue, IEEE J. Quant. Elect. 25, 2562 (1989).

    Article  CAS  Google Scholar 

  6. F. M. d’Heurle, P. Gas, I. Engstrom, S. Nygren, M. Ostling, and C. S. Petersson, IBM Research Report RC 11151, No. 50067 (1985).

  7. S. Motakef, J. M. E. Harper, F. M. d’Heurle, T. A. Gallo, and N. Herbots, J. Appl. Phys. 70, 2660 (1991).

    Article  CAS  Google Scholar 

  8. B. A. Auld, Acoustic Fields and Waves in Solids (John Wiley, New York, 1973), vol. 1, pp. 370–371.

    Google Scholar 

  9. S. P. Murarka, Suicides for VLSI Applications (Academic, Orlando, 1983), p. 47.

    Google Scholar 

  10. G. V. Samsonov, and I. M. Vinitskii, Handbook of Refractory Compounds (Plenum, New York, 1980), p. 287. The phase of TiSi2 is not specified.

    Book  Google Scholar 

  11. P. J. J. Wessels, J. F. Jongste, G. C. A. M. Janssen, A. L. Mulder, S. Radelaar, and O. B. Loopstra, J. Appl. Phys. 63, 4979 (1988).

    Article  CAS  Google Scholar 

Download references

Acknowledgments

We acknowledge J. Tauc for valuable discussions. We thank T. R. Kirst for technical assistance. This work was supported by the U. S. Department of Energy through Grant No. DE-FG02-86ER45267.

Author information

Authors and Affiliations

  1. Department of Physics, Brown University, Providence, RI, 02912, USA

    H. -N. Lin, R. J. Stoner & H. J. Maris

  2. IBM T. J. Watson Research Center, Yorktown Heights, NY, 10598, USA

    J. M. E. Harper, C. Cabral Jr., J. -M. Halbout & G. W. Rubloff

Authors
  1. H. -N. Lin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. J. Stoner
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H. J. Maris
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. M. E. Harper
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. C. Cabral Jr.
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. J. -M. Halbout
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. G. W. Rubloff
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lin, H.N., Stoner, R.J., Maris, H.J. et al. Detection of Titanium Silicide Formation and Phase Transformation by Picosecond Ultrasonics. MRS Online Proceedings Library 260, 221–226 (1992). https://doi.org/10.1557/PROC-260-221

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-260-221

Search

Navigation