Abstract
The initial phase formation at the interface of the near noble metals (Ni, Pd, and Pt) and Si is studied by Raman spectroscopy and Rutherford ion-backscattering. The results show that a crystalline Pd2Si forms immediately at the interface of Pd and Si while a disordered intermixed phase of composition ∼M2Si forms for Ni and Pt at 150°C. The results are discussed in terms of the disorder due to the kinetic process and the stability of the crystalline phase.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
G. Ottaviani, J. Vac. Sci. Technol. 16, 1112 (1979).
G. W. Rubloff and P. S. Ho, Thin Solid Films 93, 21 (1982).
For a review see J. C. Knights and G. Lucovsky, CRC Crit. Rev. in Solid State and Mater. Sci., 211 (1980).
H. Fritzsche and C. C. Tsai, Solar Mater. 1, 471 (1979).
R. J. Nemanich, C. C. Tsai, M. J. Thompson, and T. W. Sigmon, J. Vac. Sci. Technol. 19, 685 (1981).
R. J. Nemanich, T. W. Sigmon, N. M. Johnson, M. D. Moyer, and S. S. Lau, in Laser and Electron-Beam Solid Interactions and Materials Processing, edited by J. F. Gibbons, L. D. Hess, and T. W. Sigmon (North-Holland, New York, 1981), p. 541.
R. J. Nemanich, M. J. Thompson, W. B. Jackson, C. C. Tsai, and B. L. Stafford, J. Vac. Sci. Technol. 19, 685 (1981).
B. Y. Tsaur and M.-A. Nicolet, Appl. Phys. Lett. 37, 708 (1980).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Nemanich, R.J., Tsai, C.C., Stafford, B.L. et al. Initial Phase Formation at the Interface of Ni, Pd, or Pt and Si. MRS Online Proceedings Library 25, 9–14 (1983). https://doi.org/10.1557/PROC-25-9
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-25-9