Abstract
Ferroelectric thin films of PZT and PMN-PT were fabricated by the solgel spin-on technique. The films show high dielectric constants, polarization and breakdown strength values. Using a laser interferometer (ultradilatometer), the piezoelectric and electrostrictive coefficients of the films were measured. The results indicate that the sol-gel derived ferroelectric thin films have good electromechanical properties and can be used in rnicroactuator applications.
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Chen, J., Udayakumar, K.R., Brooks, K.G. et al. Ferroelectric Thin Films for Microactuator Applications. MRS Online Proceedings Library 243, 361–366 (1991). https://doi.org/10.1557/PROC-243-361
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DOI: https://doi.org/10.1557/PROC-243-361