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Zone Melting Recrystallization of Patterned Films and Low-Temperature Graphoepitaxy

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Abstract

Zone melting recrystallization (ZMR) of Si films on SiO2 has produced large-area films with electrical properties approaching those of bulk wafers. The mechanisms of film formation and the use of patterning to control orientation and defect distribution are briefly reviewed. Some examples of the use of patterning are: single-grain films have been produced by means of planar constrictions; subboundaries and impurities have been entrained to lie along straight lines separated by ~100μm through the use of lithographically-defined grating patterns; a vertical-constriction technique has enabled (100) texture to be achieved in 50μm-thick Si films; a lithographically-defined orientation filter, which takes advantage of growth-velocity anisotropy, has been used to select a predetermined azimuthal orientation.

Patterning is also fundamental to graphoepitaxy. Current research emphasizes low temperature processes based on solid-state surface-energy-driven secondary grain growth.

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References

  1. H.I. Smith, M.W. Geis, C.V. Thompson and H.A. Atwater, J. Crystal Growth 63, 527 (1983).

    CAS  Google Scholar 

  2. M.W. Geis, H.I. Smith, B.Y. Tsaur, J.C.C. Fan, E.W. Maby and D.A. Antoniadis, Appl. Phys. Lett. 40, 158 (1982).

    CAS  Google Scholar 

  3. M.W. Geis, H.I. Smith, B.Y. Tsaur, J.C.C. Fan, D.J. Silversmith and R.W. Mountain, J. Electrochem. Soc. 129, 2812 (1982).

    CAS  Google Scholar 

  4. H.A. Atwater, H.I. Smith, C.V. Thompson, M.W. Geis, to be published, Materials Lett.

  5. M.W. Geis, H.I. Smith, D.J. Silversmith, R.W. Mountain and C.V. Thompson, J. Electrochem. Soc. 130, 1178 (1983).

    CAS  Google Scholar 

  6. M. Flemings, ‘Solidification Processing’, McGraw-Hill Book Co., New York, 1974, p. 58–93, [see Chapter 3, “Cellular Precipitation”].

    Google Scholar 

  7. E. Yablonovitch, to be published, J. Electrochem. Soc.

  8. J.P. Colinge, E. Demoulin, D. Bensahel and G. Auvert, App. Phys. Letters 41, 346 (1982).

    CAS  Google Scholar 

  9. M. Haond, D.P. Vu, D. Bensahel, J. Appl. Phys. 54, 3892 (1983).

    CAS  Google Scholar 

  10. C.J. Keavney, H.A. Atwater, H.I. Smith and M.W. Geis, “Zone-Melting Recrystallization of InSb on Oxidized Silicon Wafers”, Electrochemical Society Symposium on III-V Opto-Electronics Epitaxy and Device-Related Processes, San Francisco, May 1983, Eds. V.G. Keramides and S. Mahajan; also C.J. Keavney, MS Thesis, MIT, Cambridge, MA (1983), reprinted as VLSI memo 83-143.

  11. C.C. Wong, C.J. Keavney, H.A. Atwater, C.V. Thompson and H.I. Smith, “Zone Melting Recrystallization of InSb Films on Oxidized Si Wafers”, presented at MRS Symposium, Boston, MA, November 1983. To be published in Materials Research Society Symposia Proceedings, ‘Energy Beam-Solid Interactions and Transient Thermal Processing’, Elsevier Science Publishing Co., Eds. N.M. Johnson, J.C.C. Fan (These Proceedings).

    Book  Google Scholar 

  12. D.K. Biegelsen, N.M. Johnson, D.J. Bartelink, M.D. Moyer, in Laser and Electron Beam Solid Interactions and Materials Processing, Ed. J.F. Gibbons, L.D. Hess, and T.W. Sigmon (Elsevier, North Holland, New York, 1981) p. 487.

  13. D.K. Biegelsen, N.M. Johnson, D.J. Bartelink and M.D. Moyer, Appl. Phys. Letters 38, 150 (1981).

    Article  CAS  Google Scholar 

  14. N.M. Johnson, H.C. Tuan, M.D. Moyer, M.J. Thompson, D.K. Biegelsen, L.F. Fennell and A. Chiang, in Laser Solid Interaction and Transient Thermal Processing of Materials, Ed. J. Narayan, W.L. Brown, R.A. Lemons (Elsevier, North Holland, New York, 1983) p. 605.

  15. H.A. Atwater, H.I. Smith and M.W. Geis, Appl. Phys. Letters 41, 747 (1982); H.I. Smith, H.A. Atwater and M.W. Geis, 161st Electrochem. Soc. Meeting, Montreal, Canada, 1982, Electrochem. Soc. Extended Abstracts 82-1 (1982) p. 257.

    Article  CAS  Google Scholar 

  16. H.A. Atwater, MS Thesis, MIT, Cambridge, MA (1983); also published as VLSI Memo 83-149, July 1983.

    Google Scholar 

  17. H.A. Atwater. C.V. Thompson, H.I. Smith and M.W. Geis, Appl. Phys. Lett. 43, 1126 (1983); also Electronic Materials Conference, Burlington, VT, June, 1983.

    Article  Google Scholar 

  18. J.D. Filby and S. Nielsen, Brit. J. Appl. Phys. 18, 1357 (1967) see p. 1380.

    Article  CAS  Google Scholar 

  19. N.N. Sheftal and A.N. Buzynin, Vestn. Mosk. Univ. 3, 102 (1972). Translation available from National Translation Center, The John Crerar Library, 35 W. 33rd St., Chicago, IL 60616, USA; translation NTC-83-122 00.

    Google Scholar 

  20. N.N. Sheftal and V.I. Klykov, in Abstracts 5th Conf. on Crystal Growth, Tbilisi, USSR, Sept. 1977, Vol. 1, p. 31. Translation available from National Translation Center, The John Crerar Library, 35 W. 33rd St., Chicago, IL 60616, USA; translation NTC-83-122 01.

    CAS  Google Scholar 

  21. V.I. Klykow and N.N. Sheftal, J. Crystal Growth 52, 687 (1981).

    Google Scholar 

  22. D.C. Flanders and H.I. Smith, Proc. Symp. on Electron, Ion and Photon Beam Technology, Palo Alto, CA, May 1977; D.C. Flanders and H.I. Smith, J. Vac. Sci. Technol. 15, 1001 (1978).

    Google Scholar 

  23. D.C. Flanders, PhD Thesis, MIT, Cambridge, MA (1978); reprinted as MIT Lincoln Laboratory Technical Report 533, 1978.

    Google Scholar 

  24. D.C. Flanders, D.C. Shaver and H.I. Smith, Appl. Phys. Letters 32, 597 (1978); D.C. Shaver, MS Thesis, MIT. Cambridge, MA (1978); reprinted as MIT Lincoln Laboratory Technical Report 538, 1979.

    CAS  Google Scholar 

  25. M.W. Geis, D.C. Flanders and H.I. Smith, Appl. Phys. Letters 35, 71 (1979); M.W. Geis, D.A. Antoniadis, D.J. Silversmith, R.W. Mountain and H.I. Smith, Appl. Phys. Letters 37, 454 (1980).

    CAS  Google Scholar 

  26. H.I. Smith, C.V. Thompson, M.W. Geis, R.A. Lemons, M.A. Bosch, J. Electrochem. Soc. 130, 2050 (1983).

    CAS  Google Scholar 

  27. R. Anton, H. Poppa and D.C. Flanders, J. Crystal Growth 56, 433 (1982).

    CAS  Google Scholar 

  28. H.I. Smith and D.C. Flanders, Appl. Phys. Letters 32, 349 (1978).

    CAS  Google Scholar 

  29. L.S. Darken and D.J. Lowndes, Appl. Phys. Letters 40, 954 (1982); L.S. Darken, 161st Electrochem. Soc. Meeting, Montreal, Canada, 1982, Electrochem. Soc. Extended Abstracts 82-1 (1982) p. 248; L.S. Darken, J. Electrochem. Soc. 130, 1274 (1983).

    CAS  Google Scholar 

  30. C.V. Thompson and H.I. Smith, Appl. Phys. Lett., to be published March, 1984.

    Google Scholar 

  31. T. Yonehara, C.V. Thompson, H.I. Smith, to be published in Materials Research Society Symposia Proceedings, ‘Thin Films and Interfaces’, J.E.E. Baglin and D.R. Campbell, editors, Elsevier Science Publishing Co., 1984.

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Authors and Affiliations

  1. Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, 02139

    Henry I. Smith & H. A. Atwater

  2. Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, 02139

    C. V. Thompson & C. C. Wong

  3. Lincoln Laboratory, Lexington, MA, 02173

    M. W. Geis

  4. Center for Advanced Engineering Study, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, 02139

    T. Yonehara

Authors
  1. Henry I. Smith
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  2. C. V. Thompson
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  3. M. W. Geis
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  4. H. A. Atwater
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  5. T. Yonehara
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  6. C. C. Wong
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Smith, H.I., Thompson, C.V., Geis, M.W. et al. Zone Melting Recrystallization of Patterned Films and Low-Temperature Graphoepitaxy. MRS Online Proceedings Library 23, 459–464 (1983). https://doi.org/10.1557/PROC-23-459

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