Abstract
The thermodynamic and structural aspects of amorphous titanium silicide formation by solid-state reaction have been addressed. The radial distribution function of an amorphous Ti60Si40 reaction product has been determined by electron diffraction. It is an amorphous metallic alloy, with a coordination number of about 11.4, and a local arrangement of atoms which is similar to that in a crystalline silicide, Ti5Si4. The free energy of the amorphous alloy as a function of composition has been determined from the heats of crystallization of co-deposited amorphous Ti-Si alloys, and the heat of formation of the amorphization product as measured by differential scanning calorimetry (DSC). The latter was measured to be 35 ± 5 kJ/mole. Using these data, free energy of the amorphous Ti-Si phase has been calculated by applying the CALPHAD method. These results are discussed in light of the mechanism and energetics of the amorphization reaction.
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References
K. Holloway and R. Sinclair, J. Appl. Phys. 61, 1359 (1987).
K. Holloway and R. Sinclair, J. Less-Common Metals 140, 139 (1988).
A. R. Miedema, Philips Tech. Rev. 36, 217 (1976).
R. Boom, F. R. deBower, and A. R. Miedema, J. Less Common Metals 46, 271 (1976).
L. Kaufman and H. Bernstein, in Computer Calculations of Phase Diagramns, Academic Press, New York (1970).
H. L. Lukas, E. Th. Henig, and B. Zimmermann, CALPHAD 1, 255 (1977).
H. L. Lukas, J. Weiss, E. Th. Henig, CALPHAD 1, 255 (1977).
R. Bormann, F. Girtner, and K Zöltzer, J. Less Common Met, 145, 19 (1988).
P. d'Antonio, P. Moore, J. H. Konnert and J. Katie, Trans. Am. Crystal. Ass. 13, 43, 1977.
J. Delage, Ph.D. Thesis, “Amorphisation indirite par faisccau d'ions dana le systeme Ni-Ti”, Poitiers University, 1989.
Pearson’s Handbook of Crystallographic Data for Intermetallic Phases, Eds. P. Villars and L. D. Calvert, ASM (1985).
V. N. Svechnikov, Yu. A. Kocherzhinasky, L. M. Lupko, O. G. Kulik, and E. A. Shishkin, Dokl. Akad. Nauk SSSR 193, 393 (1970).
D. A. Robins and D. I. Jenkins, Acta Met. 3, 598 (1955).
Yu. O. Esin, M. G. Valishev, A. F. Ermankov, P. V. Gel’d, and M. S. Petushevdkuj, Russ. Metall. 2, 71 (1981).
K. Holloway, PhD Thesis, Stanford University, 1989.
R. B. Schwarz and W. L. Johnson, Phys. Rev. Lett. 54, 415 (1983).
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Holloway, K., Moine, P., Delage, J. et al. Structure and Thermodynamics of Amorphous Ti-Si Produced by Solid-State Interdiffusion. MRS Online Proceedings Library 187, 71–76 (1990). https://doi.org/10.1557/PROC-187-71
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DOI: https://doi.org/10.1557/PROC-187-71