Skip to main content
SpringerLink
Log in

X-Ray Interference Measurements of Ultrathin Semiconductor Layers

  • Article
  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

We present various x-ray diffraction phenomena from semiconductor hetero-epitaxial layers. Each of these phenomena gives useful information on the layers. Knowing what to look for in the x-ray rocking curve (XRC) can make this nondestructive technique a very powerful tool for characterization of a few A-several g.tm thick layers We discuss the use of individual Bragg peak, diffraction fringe, and interference structure to obtain layer information. We particularly emphasize the use of x-ray interference in studying buried strained quantum well or quantum barrier layers. We present experimental rocking curves of an AlGaAs/GaAs double heterojunction laser structure and GaInAs/GaAs strained layer superlattices in both <001> and <111> orientations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M.A.G. Halliwell, M.H. Lyons, and M.J. Hill, J. Cryst. Growth 68, 523 (1984).

    Article  CAS  Google Scholar 

  2. V.S. Speriosu and T. Vreeland, Jr., J. Appl. Phys. 56, 1591 (1984).

    Article  CAS  Google Scholar 

  3. C.R. Wie, H.M. Kim, and K.M. Lau, SPIE Proc. 877, 41 (1988).

    Article  CAS  Google Scholar 

  4. C.R. Wie, Y-W. Choi, H.M. Kim, J.F. Chen, T. Vreeland, Jr. J.C. Tsai, this MRS Proc.

  5. C.R. Wie, J. Appl. Phys., to appear in 15 July 1989 issue.

  6. P.F. Fewster and C.J. Curling, J. Appl. Phys. 62, 4154 (1987).

    Article  CAS  Google Scholar 

  7. V.S. Speriosu, J. Appl. Phys. 52, 6094 (1981).

    Article  CAS  Google Scholar 

  8. C.R. Wie, T.A. Tombrello, and T. Vreeland, Jr., J. Appl. Phys. 59, 3743 (1986).

    Article  CAS  Google Scholar 

  9. W.J. Bartels and W. Nijman, J. Cryst. Growth, 44, 518 (1978).

    Article  CAS  Google Scholar 

  10. F.A. Jenkins and H.E. White, Fundamentals of Optics, 4th ed., (McGraw-Hill, 1976, NY), pp. 315 – 377.

  11. C.R. Wie, J. Appl. Phys. 65, 1036 (1989).

    Article  CAS  Google Scholar 

  12. C.R. Wie, J.C. Chen, H.M. Kim, P.L. Liu, Y.-W. Choi, and D.M. Hwang, Appl. Phys. Lett., submitted May 1989.

Download references

Author information

Authors and Affiliations

  1. Dept. of Electrical and Computer Engineering, State University of New York at Buffalo, Bonner Hall, Amherst, 14260, New York, USA

    C. R. Wie

Authors
  1. C. R. Wie
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wie, C.R. X-Ray Interference Measurements of Ultrathin Semiconductor Layers. MRS Online Proceedings Library 145, 467–473 (1989). https://doi.org/10.1557/PROC-145-467

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-145-467

Search

Navigation