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Electron Microscopy and Spectroscopy of Vapor Deposited Diamond

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The microstructure of vapor - deposited diamond films was analyzed by electron diffraction and transmission electron energy - loss spectroscopy. Diffraction results show regions with large numbers of stacking faults and twins. Electron energy - loss spectroscopy has been used to measure local electronic properties which are consistent with previous measurements of natural diamond. Transmission EELS investigations of the distribution of graphitic carbon at film surfaces and within the bulk are discussed.

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Authors and Affiliations

  1. Exxon Research and Engineering Co., Corporate Research Laboratory, Route 22 East, 08801, Annandale, NJ, USA

    Mark M. Disko

  2. Boston Univ., College of Engineering, 44 Cummington St., 02215, Boston, MA, USA

    T. D. Moustakas

Authors
  1. Mark M. Disko
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  2. T. D. Moustakas
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Disko, M.M., Moustakas, T.D. Electron Microscopy and Spectroscopy of Vapor Deposited Diamond. MRS Online Proceedings Library 138, 261–265 (1988). https://doi.org/10.1557/PROC-138-261

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  • DOI: https://doi.org/10.1557/PROC-138-261

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