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When Organometallic Chemistry and Metal Oxide Nanoparticles Meet Optimized Silicon-based Gas Sensor

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Abstract

A robust silicon gas sensor chip (platinum heater, low stress membrane) has been designed and successfully operated with various metal oxide nanoparticles synthesized by organometallic route (SnO2, ZnO) deposited by a generic ink-jet method. Micron thick layers made of nanostructured grains are obtained and the sensitivities under CO gas are presented.

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Authors and Affiliations

  1. Laboratoire d’Analyse et d’Architecture des Systèmes, LAAS-CNRS, 7 avenue du colonel Roche, 31077, Toulouse, France

    Pamela Yoboue & Philippe Menini

  2. University of Toulouse (Toulouse III), 118 route de Narbonne, 31062, Toulouse Cedex 02, France

    Philippe Menini, Katia Fajerwerg & Pierre Fau

  3. Laboratoire de Chimie de Coordination LCC-CNRS, 205 route de Narbonne, 31077, Toulouse Cedex 04, France

    Andre Maisonnat, Myrtil Kahn, Katia Fajerwerg, Bruno Chaudret & Pierre Fau

Authors
  1. Pamela Yoboue
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  2. Philippe Menini
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  3. Andre Maisonnat
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  4. Myrtil Kahn
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  5. Katia Fajerwerg
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  6. Bruno Chaudret
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  7. Pierre Fau
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Yoboue, P., Menini, P., Maisonnat, A. et al. When Organometallic Chemistry and Metal Oxide Nanoparticles Meet Optimized Silicon-based Gas Sensor. MRS Online Proceedings Library 1253, 518 (2010). https://doi.org/10.1557/PROC-1253-K05-18

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  • DOI: https://doi.org/10.1557/PROC-1253-K05-18

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