Skip to main content
SpringerLink
Log in

Suppression of Inelastic Deformation in Multilayer Microcantilevers with Nanoscale Coating

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Multilayer microcantilevers present in micro-/nano- electromechanical system (MEMS/NEMS) applications serving passive and active structural roles. The application and commercialization of MEMS devices suffer from reliability problems. Appropriate nanocoatings, such as atomic layer deposition (ALD), have been demonstrated to be promising solutions for these reliability problems in MEMS devices. However, the micro/nano- mechanics within and/or between the microcantilevers and nanocoatings are not fully understood, especially when temperature, time, microstructural evolution and material nonlinearities play significant roles in thermomechanical response. The overall goal of this work is to suppress and understand the inelastic deformation and microstructural evolution in multilayer microcantilevers with nanocoatings. Moreover, to better understand the stress relief and Al2O3 suppression mechanism, scanning electron microscopy (SEM) was employed to explore the microstructural evolution.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. C. L. Chang and P. Z. Chang, Sens. Actuators A, 79, 71(2000)

    Article  Google Scholar 

  2. D. C. Miller, C. F. Herrmann, H. J. Maier, S. M. George, C. R. Stoldt and K. Gall, Acta Mech., 52, 873(2005)

    CAS  Google Scholar 

  3. I.-K. Lin, X. Zhnag, Y. Zhang, J. Micromech. Microeng., 19, 085012(2008).

    Google Scholar 

  4. Y. Zhang, M. L. Dunn, K. Gall, J. W. Elam, S. M. George, J. Appl. Phys., 95, 8216(2004)

    Article  CAS  Google Scholar 

  5. Y. Zhang, M. L. Dunn, J. Microelectromech. Syst., 12, 788(2003).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Boston University, Boston, MA, 02215, USA

    I-Kuan Lin, Xin Zhang & Yanhang Zhang

  2. Department of Biomedical Engineering, Boston University, Boston, MA, 02215, USA

    Yanhang Zhang

Authors
  1. I-Kuan Lin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Xin Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yanhang Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lin, IK., Zhang, X. & Zhang, Y. Suppression of Inelastic Deformation in Multilayer Microcantilevers with Nanoscale Coating. MRS Online Proceedings Library 1222, 219 (2009). https://doi.org/10.1557/PROC-1222-DD02-19

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1557/PROC-1222-DD02-19

Search

Navigation