Abstract
Theoretical analysis can impart great benefits on the rationale design of 3D photonic structures by revealing the underlying mechanisms of structural distortion during each processing step. In this report, we quantitatively study the distortion of a three-term diamond-like structure fabricated in SU-8 polymer by four-beam interference lithography, which can be attributed to refraction at the air-film interface, and resist film shrinkage during lithographic process. In study of photonic bandgap (PBG) properties of Si photonic crystals templated by the SU-8 structures, we find that the distortion has degraded the quality of PBGs. Furthermore, we theoretically design new optical setups to fabricate three-term diamond-like structure with minimal deformation. Instead of single exposure of four beams, we use triple exposure of two beams, one from the central beam and the other from the side beam each time. A set of new linear polarization vectors is suggested to enhance the contrast between the minimal and maximal intensities of interference pattern.
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References
E. Yablonovitch, Phys. Rev. Lett. 58, 2059 (1987).
S. John, Phys. Rev. Lett. 58, 2486 (1987).
J.D. Joannopoulos, S.G. Johnson, R.D. Meade, and J.N. Winn, Photonic crystals, 2nd ed. (Princeton University Press, 2008).
S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and J. Bur, Nature 394, 251 (1998).
S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, Nature 412, 697 (2001).
M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, Nature 404, 53 (2000).
Y. A. Vlasov, X. Z. Bo, J. C. Sturm, and D. J. Norris, Nature 414, 289 (2001).
S. R. Kennedy, M. J. Brett, O. Toader, and S. John, Nano Letters 2, 59 (2002).
K. K. Seet, V. Mizeikis, S. Matsuo, S. Juodkazis, and H. Misawa, Adv. Mater. 17, 541 (2005).
C. K. Ullal, M. Maldovan, M. Wohlgemuth, and E. L. Thomas, J. Opt. Soc. Am. A Opt. Image Sci. Vis. 20, 948 (2003).
R. L. Sutherland, V. P. Tondiglia, L. V. Natarajan, S. Chandra, D. Tomlin, and T. J. Bunning, Opt. Express 10, 1074 (2002).
Y. V. Miklyaev, D. C. Meisel, A. Blanco, G. von Freymann, K. Busch, W. Koch, C. Enkrich, M. Deubel, and M. Wegener, Appl. Phys. Lett. 82, 1284 (2003).
C. K. Ullal, M. Maldovan, E. L. Thomas, G. Chen, Y. J. Han, and S. Yang, Appl. Phys. Lett. 84, 5434 (2004).
X. Zhu, Y. Xu, and S. Yang, Opt. Express 15, 16546 (2007).
M. Born and E. Wolf, Principles of optics: electromagnetic theory of propagation, interference and diffraction of light (Cambridge University Press, Cambridge, U.K.; New York, 1999).
Y. C. Zhong, S. A. Zhu, H. M. Su, H. Z. Wang, J. M. Chen, Z. H. Zeng, and Y. L. Chen, Appl. Phys. Lett. 87, 061103 (2005).
J. H. Moon, S. Yang, W. T. Dong, J. W. Perry, A. Adibi, and S. M. Yang, Opt. Express 14, 6297 (2006).
L. Z. Cai, X. L. Yang, and Y. R. Wang, Opt. Lett. 27, 900 (2002).
Th. Hahn, International tables for crystallography. Vol A, Space-group symmetry, 5th ed. ed. (Kluwer, Dordrecht, London, 2002).
U. Shmueli, International tables for crystallography. Vol. B, Reciprocal space, 2nd ed. (Kluwer, Dordrecht, Boston, 2001).
D. C. Meisel, M. Diem, M. Deubel, F. Perez Willard, S. Linden, D. Gerthsen, K. Busch, and M. Wegener, Adv. Mater. 18, 2964 (2006).
W. H. Zhou, S. M. Kuebler, K. L. Braun, T. Y. Yu, J. K. Cammack, C. K. Ober, J. W. Perry, and S. R. Marder, Science 296, 1106 (2002).
S. G. Johnson and J. D. Joannopoulos, Opt. Express 8, 173 (2001).
J. H. Jang, C. K. Ullal, M. Maldovan, T. Gorishnyy, S. Kooi, C. Y. Koh, and E. L. Thomas, Adv. Funct. Mater. 17, 3027 (2007).
R. C. Gauthier and K. W. Mnaymneh, Opt. Laser Technol. 36, 625 (2004).
N. D. Lai, W. P. Liang, J. H. Lin, C. C. Hsu, and C. H. Lin, Opt. Express 13, 9605 (2005).
Y. Liu, S. Liu, and X. S. Zhang, Appl. Opt. 45, 480 (2006).
A. Dwivedi, J. Xavier, J. Joseph, and K. Singh, Appl. Opt. 47, 1973 (2008).
A. Hayek, Y Xu, T. Okada, S. Barlow, X Zhu, J. H. Moon, S. R. Marder, and S. Yang, J. Mater. Chem. 18, 3316 (2008).
Acknowledgments
This work is supported by the Office of Naval Research (ONR), Grant # N00014-05-0303. XZ would like to thank Jun Hyuk Moon (Sogang Univ.), Jingjing Li (HP) and Liang Fu (Univ. of Pennsylvania) for useful discussion and insights.
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Zhu, X., Xu, Y., Cheng, SC. et al. Fidelity of Holographic Lithography for Fabrication of 3D SU-8 Photonic Structures and How to Minimize Distortion by Optical Design. MRS Online Proceedings Library 1182, 52–60 (2009). https://doi.org/10.1557/PROC-1182-EE13-07
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DOI: https://doi.org/10.1557/PROC-1182-EE13-07