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Seeding Solid Phase Crystallization of Amorphous Silicon Films with Embedded Nanocrystals

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Abstract

Silicon nanocrystals with diameters up to 30 nm are used as nucleation seeds for fast solid phase crystallization of amorphous silicon films. Purely amorphous films required an incubation time of up to 12 hours at 600°C prior to the onset of nucleation, while films with nanocrystals embedded between layers of amorphous silicon grew immediately upon annealing in a quartz tube furnace. Structural characterization was performed by heated-stage transmission electron microscopy and Raman spectroscopy.

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References

  1. www.eia.doe.gov,

  2. M.A. Green K. Emery Y. Hisikawa W. Warta Prog. Photovolt: Res. Appl., 15 (2007) 425–430

    Article  CAS  Google Scholar 

  3. S. A. Campbell (2001). The Science and Engineering of Microelectronics Fabrication. New York, Oxford University Press.

    Google Scholar 

  4. Y.L. Jiang Y.C. Chang Thin Solid Films, 500 (2006) 316–321

    Article  CAS  Google Scholar 

  5. A. H. Mahan, B. Roy Jr. R. C. Reedy D. W. Readey, D. S. Ginley, J. Appl. Phys., 99 (2006) 023507.

    Article  Google Scholar 

  6. R. B. Iverson, R. Reif J. Appl. Phys., 62 (1987) 1675–1681

    Article  CAS  Google Scholar 

  7. C.C. Kuo W.C. Yeh J.F. Lee J.W. Jeng Thin Solid Films, 515 (2007) 8094–8100

    Article  CAS  Google Scholar 

  8. Y. Ishikawa A. Nakamura U. Uraoka T. Fuyuki Jpn. J. Appl. Phys., 43 (2004) 877–881

    Article  CAS  Google Scholar 

  9. S.R. Lee K.M. Ahn B.T. Ahn J. Electrochem. Soc., 154 (2007) H778–H781.

    Article  CAS  Google Scholar 

  10. A. Bapat C. Anderson C.R. Perrey C.B. Carter S.A. Campbell U. Kortshagen Plasma Phys. Control. Fusion, 46 (2004) B97–B109.

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Mechanical Engineering, University of Minnesota, 111 Church St. S.E., 55455, Minneapolis, MN, USA

    Curtis Anderson & Uwe Kortshagen

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  1. Curtis Anderson
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  2. Uwe Kortshagen
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Anderson, C., Kortshagen, U. Seeding Solid Phase Crystallization of Amorphous Silicon Films with Embedded Nanocrystals. MRS Online Proceedings Library 1066, 10660614 (2007). https://doi.org/10.1557/PROC-1066-A06-14

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  • DOI: https://doi.org/10.1557/PROC-1066-A06-14

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