Skip to main content
Log in

Photo-Oxidation and the Absence of Photodarkening in Ge2Sb2Te5 Phase Change Material

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Ge2Sb2Te5 is under intense investigation for phase-change memory devices, including rewriteable DVDs where optical illumination is used to switch between the glassy and crystalline states. We investigate the influence of optical irradiation on the amorphous phase. Many chalcogenide glasses display photo-oxidation, photodarkening or photo-bleaching, but little has been reported on the Ge-Sb-Te system. Using spectroscopic ellipsometry (SE) and secondary ion mass spectrometry, we determine that the samples have a strong tendency to photo-oxidize; if this is not accounted for, then the analysis of SE data appears to show photodarkening. Other authors recently reported photodarkening in nonstoichiometric GexSb20−xTe80 [Pamukchieva et al., Proc. SPIE 5581, 608 (2004); Pamukchieva et al., J. Optoelectron. Adv. Mater 7, 1277 (2005)], but our analysis suggests that the changes were actually the result of photo-oxidation. The oxide has lower values of (n, k) than Ge2Sb2Te5, and can be etched by hydrofluoric acid or water. Our observation of negligible photodarkening is consistent with previous work that found less photodarkening in tellurides compared with selenides or sulfides, and that an increase in the mean coordination number, here by Ge addition, further reduces the photodarkening effect.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. M. Wuttig, in Nanoelectronics and Information Technology, edited by R. Waser (Wiley, Weinheim, 2003), pp. 645([0-9]+)58.

    Google Scholar 

  2. K. Shimakawa, A. Kolobov, and S. R. Elliott, Adv. Phys. 44, 475–588 (1995).

    Article  CAS  Google Scholar 

  3. V. Pamukchieva, A. Szekeres, and K. Todorova, Proceedings of SPIE-The International Society for Optical Engineering 5581, 608–13 (2004).

    CAS  Google Scholar 

  4. V. Pamukchieva and A. Szekeres, J. Optoelec. Adv. Mater. 7, 1277–80 (2005).

    CAS  Google Scholar 

  5. V. Pamukchieva, A. Szekeres, and K. Todorova, Journal of Materials Science: Materials in Electronics 14, 837–8 (2003).

    CAS  Google Scholar 

  6. B.-S. Lee, J. R. Abelson, S. G. Bishop, D. H. Kang, B. K. Cheong, and K. B. Kim, J. Appl. Phys. 97, 093509 (2005).

    Article  Google Scholar 

  7. I. Friedrich, V. Weidenhof, W. Njoroge, P. Franz, and M. Wuttig, J. Appl. Phys. 87, 4130–4 (2000).

    Article  CAS  Google Scholar 

  8. H. G. Tompkins and W. A. McGahan, Spectroscopic ellipsometry and reflectometry: a user’s guide (Wiley, New York, 1999).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lee, BS., Xiao, Y., Bishop, S.G. et al. Photo-Oxidation and the Absence of Photodarkening in Ge2Sb2Te5 Phase Change Material. MRS Online Proceedings Library 918, 204 (2006). https://doi.org/10.1557/PROC-0918-H02-04

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-0918-H02-04

Navigation