Skip to main content
SpringerLink
Log in

Thin-Film Deposition Via Pulsed Laser Ablation

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

We report on a novel experimental approach for thin-film deposition via pulsed laser ablation. A combination of design features including the incorporation of original sample manipulation methods as well as enhanced analytical capabilities allow for experimental control and flexibility for thin-film deposition studies of a variety of materials. Here, the application is illustrated with a study of 532 nm pulsed laser ablation and subsequent deposition of CdTe.Conditions have been found that produce a mildly energetic ablation plume, and the average kinetic energies for the neutral and ionic ablation species in the plume have been determined to be approximately 2 and 11 eV, respectively. It has been shown that in the presence of an electric field the ionic species can be diverted away from the detector (and subsequently from the eventual deposit). Thin film deposits clearly reveal an increase in the number of sub-micron particles when direct ablation ions contribute to the deposition. The possibility for extraction of ablation ions and preparation of ablation plumes of neutrals only has been clearly demonstrated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. T. Cheungh and H. Sankur, CRC Crit. Rev. Solid State Mat. Sci. 15, 63–109 (1988).

    Article  Google Scholar 

  2. H. Sankur, Thin Solid Films 218, 161–169 (1992).

    Article  CAS  Google Scholar 

  3. Martin von Allmen and Andreas Blatter, Laser-Beam Interactions with Materials: Physical Principles and Applications (Springer series in materials science, V.2, Springer Verlag, Berlin, 1995), pp. 159–165.

    Google Scholar 

  4. D. B. Geohegan, inLaser Ablation: Mechanisms and Applications, edited by J. C. Miller (Springer Verlag, Berlin, 1991), pp. 29–37.

  5. V. Panayotov, K. Hamar, T. L. T. Birdwhistell, C. Red, J. Dillon, D. Dennison, A. Barnes, and B. Koplitz, Appl. Phys. Lett. 66, 2241 (1995).

    Article  CAS  Google Scholar 

  6. V. Panayotov, K. Hamar, T. L. T. Birdwhistell, and B. Koplitz, Proc. SPIE 2547, 328 (1995).

  7. V. Panayotov, K. Hamar, C. Red, T. L. T. Birdwhistell, and B. Koplitz, J. Phys. Chem., submitted for publication.

  8. V. Panayotov, T. L. T. Birdwhistell, and B. Koplitz, J. Appl. Phys., submitted for publication.

  9. S. M. Kauzlarich, Comments Inorg. Chem. 10, 75 (1990).

    Article  CAS  Google Scholar 

  10. Patents in preparation.

  11. P. D. Brewer, J. J. Zinck, and G. L. Olson, in Laser Ablation: Mechanisms and Applications, edited by J. C. Miller (Springer Verlag, Berlin, 1991), pp. 96–105.

  12. Deconvolution and parameter extraction procedures are under preparation for publication.

Download references

Author information

Authors and Affiliations

  1. Department of Chemistry, Tulane University, New Orleans, LA, 70118, USA

    V. G. Panayotov, M. C. Kelly, G. G. Gomlak & B. D. Koplitz

  2. Department of Chemistry, Xavier University, New Orleans, LA, 70125, USA

    T. L. T. Birdwhistell

Authors
  1. V. G. Panayotov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. C. Kelly
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G. G. Gomlak
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. T. L. T. Birdwhistell
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. B. D. Koplitz
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Panayotov, V.G., Kelly, M.C., Gomlak, G.G. et al. Thin-Film Deposition Via Pulsed Laser Ablation. MRS Online Proceedings Library 441, 469–474 (1996). https://doi.org/10.1557/PROC-441-469

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-441-469

Search

Navigation