Abstract
A solid-state nanopore was integrated into an optofluidic sensor chip, liquid-core anti-resonant reflecting optical waveguide (ARROW). The solid-state nanopore worked as a smart gate, which simultaneously provided characteristic electrical signals and controlled the entry of single nanoparticles into the liquid-core channel. The subsequent fluorescence detection further identified the nanoparticles by providing optical signals within a specific wavelength range. In this work, correlated electrical and optical detection of single nanoparticles, H1N1 viruses, and λ-DNA molecules was demonstrated. Different types of particles in a mixture were successfully discriminated. Moreover, the flow velocity in the liquid-core channel was extracted with the help of combined analysis of electrical and optical signals. Enhanced electrical sensitivity using a solid-state nanopore with a thin limiting aperture sculpted by SiO2 deposition was also shown.
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Acknowledgments
We acknowledge support by the W.M. Keck Center for Nanoscale Optofluidics at University of California, Santa Cruz, the NSF under grants CBET-1402848 and CBET-1402880, and the NIH under grants R01EB006097 and R21EB008802. J.W.P. acknowledges support by the Eugene Cota-Robles Fellowship and the National Science Foundation Graduate Fellowship Research Program under Grant No. DGE 0809125.
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Liu, S., Zhao, Y., Stott, M. et al. Electro-Optical Detection of Single Nanoparticles on a Nanopore-Optofluidic Chip. MRS Online Proceedings Library 1720, 17–22 (2014). https://doi.org/10.1557/opl.2014.954
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DOI: https://doi.org/10.1557/opl.2014.954