Skip to main content
SpringerLink
Log in

Fabrication of Three-Dimensional Microfluidic Systems by Soft Lithography

  • Technical Feature
  • Published:
MRS Bulletin Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. M. Madou, Fundamentals of Microfabrication (CRC Press, Boca Raton, FL, 1997)

    Google Scholar 

  2. G.T.A. Kovacs, Micromachined Transducers Sourcebook (McGraw-Hill, New York, 1998).

    Google Scholar 

  3. N. Maluf, An Introduction to Microelectromechanical Systems Engineering (Artech House, Norwood, MA, 2000)

    Google Scholar 

  4. C.S. Effenhauser, A. Manz, and H.M. Widmer, Anal. Chem. 65 (1993) p. 2637

    Article  CAS  Google Scholar 

  5. D.J. Harrison, K. Fluri, K. Seiler, Z. Fan, C.S. Effenhauser, and A. Manz, Science 261 (1993) p. 895

    Article  CAS  Google Scholar 

  6. R. Kapur, K.A. Hiuliano, M. Camoana, T. Adams, K. Olson, D. Jung, M. Mrksich, C. Vasudevan, and D.L. Taylor, Biomed. Microdevices 2 (1999) p. 99

    Article  CAS  Google Scholar 

  7. J.M. Ramsey, S.C. Jacobsen, and M.R. Knapp, Nature Med. 1 (1995) p. 1093

    Article  CAS  Google Scholar 

  8. K. Seiler, D.J. Harrison, and A. Manz, Anal. Chem. 65 (1993) p. 1481.

    Article  CAS  Google Scholar 

  9. Y. Xia, J.A. Rogers, K.E. Paul, and G.M. Whitesides, Chem. Rev. 99 (7) (1999) p. 1823.

    Article  CAS  Google Scholar 

  10. Y. Xia and G.M. Whitesides, Angew. Chem., Int. Ed. Engl. 37 (5) (1998) p. 550.

    Article  CAS  Google Scholar 

  11. S. Quake and A. Scherer, Science 290 (2000) p. 1536.

    Article  CAS  Google Scholar 

  12. H. Wu, S.T. Brittain, J.R. Anderson, B. Grzybowski, S. Whitesides, and G.M. Whitesides, J. Am. Chem. Soc. 122 (2000) p. 12691.

    Article  CAS  Google Scholar 

  13. R.J. Jackman, S.T. Brittain, A. Adams, M.G. Prentiss, and G.M. Whitesides, Science 280 (1998) p. 2089

    Article  CAS  Google Scholar 

  14. R.J. Jackman, S.T. Brittain, and G.M. Whitesides, JMEMS 7 (2) (1998) p. 261

    CAS  Google Scholar 

  15. E.E. Hui, R.T. Howe, and M.S. Rodgers, in Proc. 13th IEEE Int. Conf. on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000).

    Google Scholar 

  16. A.J. Black, K.E. Paul, J. Aizenberg, and G.M. Whitesides, J. Am. Chem. Soc. 121 (36) (1999) p. 8356

    Article  CAS  Google Scholar 

  17. J. Aizenberg, A.J. Black, and G.M. Whitesides, Nature 394 (1998) p. 868.

    Article  CAS  Google Scholar 

  18. J.A. Rogers, K.E. Paul, R.J. Jackman, and G.M. Whitesides, J. Vac. Sci. Technol.B, 26 (1) (1998) p. 59.

    Article  Google Scholar 

  19. K.E. Paul, T.L. Breen, J. Aizenberg, and G.M. Whitesides, Appl. Phys. Lett. 73 (1998) p. 2893.

    Article  CAS  Google Scholar 

  20. J.C. Love, K.E. Paul, and G.M. Whitesides, Adv. Mater. 13 (8) (2001) p. 604.

    Article  CAS  Google Scholar 

  21. J.C. Love, D.B. Wolfe, H.O. Jacobs, and G.M. Whitesides, Langmuir (2001) submitted for publication.

    Google Scholar 

  22. J.C. McDonald, D.C. Duffy, J.R. Anderson, D.T. Chiu, H.K. Wu, O.J.A. Schueller, and G.M. Whitesides, Electrophoresis 21 (1) (2000) p. 27.

    Article  CAS  Google Scholar 

  23. D.C. Duffy, J.C. McDonald, O.J.A. Schueller, and G.M. Whitesides, Anal. Chem. 70 (23) (1998) p. 4974.

    Article  CAS  Google Scholar 

  24. M. Morra, E. Occhiello, R. Marola, F. Garbassi, P. Humphrey, and D. Johnson, J. Colloid Interface Sci. 137 (1990) p. 11.

    Article  CAS  Google Scholar 

  25. G.K. Batchelor, An Introduction to Fluid Dynamics (Cambridge University Press, Cambridge, UK, 1967).

    Google Scholar 

  26. J.R. Anderson, D.T. Chiu, R.J. Jackman, O. Cherniavskaya, J.C. McDonald, H.K. Wu, S.H. Whitesides, and G.M. Whitesides, Anal. Chem. 72 (14) (2000) p. 3158.

    Article  CAS  Google Scholar 

  27. S. Takayama, J.C. McDonald, E. Ostuni, M.N. Liang, P.J.A. Kenis, R.F. Ismagilov, and G.M. Whitesides, Proc. Natl. Acad. Sci. 96 (10) (1999) p. 5545

    Article  CAS  Google Scholar 

  28. P.J.A. Kenis, R.F. Ismagilov, and G.M. Whitesides, Science 285 (5424) (1999) p. 83.

    Article  CAS  Google Scholar 

  29. S. Takayama, E. Ostuni, X. Qian, J.C. McDonald, X. Jiang, P. LeDuc, M.H. Wu, D.E. Ingber, and G.M. Whitesides, Adv. Mater. 13 (8) (2001) p. 570.

    Article  CAS  Google Scholar 

  30. B.H. Weigl and P. Yager, Science 283 (1999) p. 346.

    Article  Google Scholar 

  31. N.L. Jeon, S.K.W. Dertinger, D.T. Chiu, I.S. Choi, A.D. Stroock, and G.M. Whitesides, Langmuir 16 (22) (2000) p. 8311.

    Article  CAS  Google Scholar 

  32. R.H. Liu, M.A. Stremler, K.V. Sharp, M.G. Olsen, J.G. Santiago, R.J. Adrian, H. Aref, and D.J. Beebe, JMEMS 9 (2) (2000).

    Google Scholar 

  33. R.F. Ismagilov, D. Rosmarin, P.J.A. Kenis, D.T. Chiu, W. Zhang, H.A. Stone, and G.M. Whitesides, Anal. Chem. (2001) submitted for publication.

    Google Scholar 

  34. D.T. Chiu, E. Pezzoli, H. Wu, A.D. Stroock, and G.M. Whitesides, Proc. Natl. Acad. Sci. 98 (6) (2001) p. 2961.

    Article  CAS  Google Scholar 

  35. D.J. Beebe, J.S. Moore, J.M. Bauer, Q. Yu, R.H. Liu, C. Devadoss, and B.-H. Jo, Nature 404 (2000) p. 588

    Article  CAS  Google Scholar 

  36. D.C. Duffy, O.J.A. Schueller, S.T. Brittain, and G.M. Whitesides, J. Micromechan. Microeng. 9 (3) (1999) p. 211

    Article  CAS  Google Scholar 

  37. M.A. Unger, H.-P. Chou, T. Thorsen, A. Scherer, and S.R. Quake, Science 288 (2000) p. 113.

    Article  CAS  Google Scholar 

  38. N.L. Jeon, D.T. Chiu, C.J. Wargo, H. Wu, I.S. Choi, J.R. Anderson, and G.M. Whitesides (unpublished manuscript).

  39. R.J. Jackman, D.C. Duffy, O. Cherniavskaya, and G.M. Whitesides, Langmuir 15 (8) (1999) p. 2973.

    Article  CAS  Google Scholar 

  40. D.T. Chiu, N.L. Jeon, S. Huang, R.S. Kane, C.J. Wargo, I.S. Choi, D.E. Ingber, and G.M. Whitesides, Proc. Natl. Acad. Sci. 97 (6) (2000) p. 2408.

    Article  CAS  Google Scholar 

  41. B. Xu, F. Arias, S.T. Brittain, X.-M. Zhao, B. Grzybowski, S. Torquato, and G.M. Whitesides, Adv. Mater. 11 (14) (1999) p. 1186.

    Article  CAS  Google Scholar 

  42. J.A. Rogers, R.J. Jackman, and G.M. Whitesides, Adv. Mater. 9 (6) (1997) p. 475.

    Article  CAS  Google Scholar 

  43. H. Wu (unpublished manuscript).

  44. J.A. Rogers, K.E. Paul, R.J. Jackman, and G.M. Whitesides, Appl. Phys. Lett. 70 (20) (1997) p. 2658.

    Article  CAS  Google Scholar 

  45. J. Han and H.G. Craighead, Science 288 (2000) p. 1026.

    Article  CAS  Google Scholar 

Download references

Authors
  1. J. Love Christopher
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Janelle R. Anderson
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. George M. Whitesides
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Love Christopher, J., Anderson, J.R. & Whitesides, G.M. Fabrication of Three-Dimensional Microfluidic Systems by Soft Lithography. MRS Bulletin 26, 523–528 (2001). https://doi.org/10.1557/mrs2001.124

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/mrs2001.124

Search

Navigation