Abstract
Modern nanomaterials contain complexity that spans all three dimensions—from multigate semiconductors to clean energy nanocatalysts to complex block copolymers. For nanoscale characterization, it has been a long-standing goal to observe and quantify the three-dimensional (3D) structure—not just surfaces, but the entire internal volume and the chemical arrangement. Electron tomography estimates the complete 3D structure of nanomaterials from a series of two-dimensional projections taken across many viewing angles. Since its first introduction in 1968, electron tomography has progressed substantially in resolution, dose, and chemical sensitivity. In particular, scanning transmission electron microscope tomography has greatly enhanced the study of 3D nanomaterials by providing quantifiable internal morphology and spectroscopic detection of elements. Combined with recent innovations in computational reconstruction algorithms and 3D visualization tools, scientists can interactively dissect volumetric representations and extract meaningful statistics of specimens. This article highlights the maturing field of electron tomography and the widening scientific applications that utilize 3D structural, chemical, and functional imaging at the nanometer and subnanometer length scales.
Similar content being viewed by others
References
B.D.A. Levin, E. Padgett, C.-C. Chen, M.C. Scott, R. Xu, W. Theis, Y. Jiang, Y. Yang, C. Ophus, H. Zhang, D.-H. Ha, D. Wang, Y. Yu, H.D. Abruña, R.D. Robinson, P. Ercius, L.F. Kourkoutis, J. Miao, D.A. Muller, R. Hovden, Sci. Data 3, 160041 (2016).
D.J. De Rosier, A. Klug, Nature 217 (5124), 130 (1968).
R.A. Crowther, L.A. Amos, J.T. Finch, D.J.D. Rosier, A. Klug, Nature 226 (5244), 421 (1970).
W. Hoppe, Hoppe-Seyler’s Z. Physiol. Chem. 355, 1483 (1974).
W. Hoppe, H.J. Schramm, M. Sturm, N. Hunsmann, J. Gaßmann, Z. Naturforsch. A 31 (11), 1380 (1976).
Protein Data Bank in Europe, https://www.ebi.ac.uk/pdbe/emdb/statistics_emmethod.html (accessed December 2019)/pdbe/emdb/statistics_emmethod.html (accessed December 2019).
H. Jinnai, Y. Nishikawa, R.J. Spontak, S.D. Smith, D.A. Agard, T. Hashimoto, Phys. Rev. Lett. 84 (3), 518 (2000).
A.J. Koster, U. Ziese, A.J. Verkleij, A.H. Janssen, K.P. de Jong, J. Phys. Chem. B 104 (40), 9368 (2000).
R. Henderson, P. Unwin, Nature 257, 28 (1975).
T.J.A. Slater, A. Janssen, P.H.C. Camargo, M.G. Burke, N.J. Zaluzec, S.J. Haigh, Ultramicroscopy 162, 61 (2016).
P.A. Midgley, M. Weyland, Ultramicroscopy 96 (3), 413 (2003).
E. Candes, J. Romberg, “Robust Signal Recovery from Incomplete Observations,” 2006 IEEE Int. Conf. Image Proc. (2006), pp. 1281–1284.
L.M. Brown, P.E. Batson, N. Dellby, O.L. Krivanek, Ultramicroscopy 157, 88 (2015).
P.A. Midgley, M. Weyland, J.M. Thomas, B.F.G. Johnson, Chem. Commun. 10, 907 (2001).
H. Zhang, D.-H. Ha, R. Hovden, L.F. Kourkoutis, R.D. Robinson, Nano Lett. 11 (1), 188 (2010).
J. Radon, Mathematische-Physische 69, 262 (1917).
International Technology Roadmap for Semiconductors, (2014), http://www.itrs2.net.
P.D. Cherns, F. Lorut, S. Becu, C. Dupré, K. Tachi, D. Cooper, A. Chabli, T. Ernst, AIP Conf. Proc. 1173 (1), 290 (2009).
Y. Xie, W. Kim, Y. Kim, S. Kim, J. Gonsalves, M. BrightSky, C. Lam, Y. Zhu, J.J. Cha, Adv. Mater. 30 (9), 1705587 (2018).
C. Kübel, J. Kübel, S. Kujawa, J.S. Luo, H.M. Lo, J.D. Russell, AIP Conf. Proc. 817 (1), 223 (2006).
P. Ercius, M. Weyland, D.A. Muller, L.M. Gignac, Appl. Phys. Lett. 88 (24), 243116 (2006).
H.L. Xin, P. Ercius, K.J. Hughes, J.R. Engstrom, D.A. Muller, Appl. Phys. Lett. 96 (22), 223108 (2010).
G. Möbus, R.C. Doole, B.J. Inkson, Ultramicroscopy 96 (3), 433 (2003).
N.J. Zaluzec, Micros. Today 17 (4), 56 (2009).
H.S. von Harrach, P. Dona, B. Freitag, H. Soltau, A. Niculae, M. Rohde, Microsc. Microanal. 15 (2), 208 (2009).
K. Lepinay, F. Lorut, R. Pantel, T. Epicier, Micron 47, 43 (2013).
A. Yurtsever, M. Weyland, D.A. Muller, Appl. Phys. Lett. 89 (15), 151920 (2006).
M. Weyland, P.A. Midgley, Microsc. Microanal. 9 (6), 542 (2003).
M.H. Gass, K.K.K. Koziol, A.H. Windle, P.A. Midgley, Nano Lett. 6 (3), 376 (2006).
S.M. Collins, E. Ringe, M. Duchamp, Z. Saghi, R.E. Dunin-Borkowski, P.A. Midgley, ACS Photonics 2 (11), 1628 (2015).
L. Yedra, A. Eljarrat, R. Arenal, E. Pellicer, M. Cabo, A. López-Ortega, M. Estrader, J. Sort, M.D. Baró, S. Estradé, F. Peiró, Ultramicroscopy 122, 12 (2012).
K. Jarausch, P. Thomas, D.N. Leonard, R. Twesten, C.R. Booth, Ultramicroscopy 109 (4), 326 (2009).
D. Wang, Y. Yu, H.L. Xin, R. Hovden, P. Ercius, J.A. Mundy, H. Chen, J.H. Richard, D.A. Muller, F.J. DiSalvo, H.D. Abruña, Nano Lett. 12 (10), 5230 (2012).
E. Padgett, N. Andrejevic, Z. Liu, A. Kongkanand, W. Gu, K. Moriyama, Y. Jiang, S. Kumaraguru, T.E. Moylan, R. Kukreja, D.A. Muller, J. Electrochem. Soc. 165 (3), F173 (2018).
Y. Yu, H.L. Xin, R. Hovden, D. Wang, E.D. Rus, J.A. Mundy, D.A. Muller, H.D. Abruña, Nano Lett. 12 (9), 4417 (2012).
A. Genc, L. Kovarik, M. Gu, H. Cheng, P. Plachinda, L. Pullan, B. Freitag, C. Wang, Ultramicroscopy 131, 24 (2013).
W. Xia, Y. Yang, Q. Meng, Z. Deng, M. Gong, J. Wang, D. Wang, Y. Zhu, L. Sun, F. Xu, J. Li, H.L. Xin, ACS Nano 12 (8), 7866 (2018).
A. Klug, R.A. Crowther, Nature 238 (5365), 435 (1972).
R.N. Bracewell, A.C. Riddle, Astrophys. J. 150, 427 (1967).
A. Klug, Philos. Trans. R. Soc. Lond. B Biol. Sci. 261 (837), 173 (1971).
R. Hovden, P. Ercius, Y. Jiang, D. Wang, Y. Yu, H.D. Abruña, V. Elser, D.A. Muller, Ultramicroscopy 140, 26 (2014).
R. Hovden, H.L. Xin, D.A. Muller, Microsc. Microanal. 17 (1), 75 (2010).
M.C. Scott, C.-C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B.C. Regan, J. Miao, Nature 483 (7390), 444 (2012).
Y. Yang, C.-C. Chen, M.C. Scott, C. Ophus, R. Xu, A. Pryor, L. Wu, F. Sun, W. Theis, J. Zhou, M. Eisenbach, P.R.C. Kent, R.F. Sabirianov, H. Zeng, P. Ercius, J. Miao, Nature 542 (7639), 75 (2017).
J. Zhou, Y. Yang, P. Ercius, J. Miao, MRS Bull. 45 (4), 290 (2020).
B.F. McEwen, M. Marko, C.E. Hsieh, C. Mannella, J. Struct. Biol. 138, 47 (2002).
M.R. Howells, T. Beetz, H.N. Chapman, C. Cui, J.M. Holton, C.J. Jacobsen, J. Kirz, E. Lima, S. Marchesini, H. Miao, D. Sayre, D.A. Shapiro, J.C.H. Spence, D. Starodub. J. Electron Spectrosc. Relat. Phenom. 170 (1), 4 (2009).
P. Gilbert, J. Theor. Biol. 36 (1), 105 (1972).
Y.Z. O’Connor, J.A. Fessler, IEEE Trans. Med. Imaging 25 (5), 582 (2006).
A. Pryor, Y. Yang, A. Rana, M. Gallagher-Jones, J. Zhou, Y.H. Lo, G. Melinte, W. Chiu, J.A. Rodriguez, J. Miao, Sci. Rep. 7 (1), 1 (2017).
K.J. Batenburg, S. Bals, J. Sijbers, C. Kübel, P.A. Midgley, J.C. Hernandez, U. Kaiser, E.R. Encina, E.A. Coronado, G. Van Tendeloo, Ultramicroscopy 109 (6), 730 (2009).
E.J. Candès, T. Tao, IEEE Trans. Inf. Theory 52 (12) 5406 (2006).
E.J. Candès, J. Romberg, T. Tao, IEEE Trans. Inf. Theory 52 (2), 489 (2006).
Z. Saghi, D.J. Holland, R. Leary, A. Falqui, G. Bertoni, A.J. Sederman, L.F. Gladden, P.A. Midgley, Nano Lett. 11 (11), 4666 (2011).
Y. Jiang, R. Hovden, D.A. Muller, V. Elser, Microsc. Microanal. 20 (6), 796 (2014).
J. Schwartz, Y. Jiang, Y. Wang, A. Aiello, P. Bhattacharya, H. Yuan, Z. Mi, N. Bassim, R. Hovden, Microsc. Microanal. 25 (3), 705 (2019).
J.R. Kremer, D.N. Mastronarde, J.R. McIntosh, J. Struct. Biol. 116 (1), 71 (1996).
B. Levin, Y. Jiang, E. Padgett, S. Waldon, C. Quammen, C. Harris, U. Ayachit, M. Hanwell, P. Ercius, D.A. Muller, R. Hovden, Micros. Today 26 (1) 12 (2018).
Y. Jiang, Z. Chen, Y. Han, P. Deb, H. Gao, S. Xie, P. Purohit, M.W. Tate, J. Park, S.M. Gruner, V. Elser, D.A. Muller, Nature 559 (7714), 343 (2018).
O. Panova, C. Ophus, C.J. Takacs, K.C. Bustillo, L. Balhorn, A. Salleo, N. Balsara, A.M. Minor, Nat. Mater. 18, 860 (2019).
S. Gao, P. Wang, F. Zhang, G.T. Martinez, P.D. Nellist, X. Pan, A.I. Kirkland, Nat. Comm. 8 (1), 163 (2017).
V. Migunov, H. Ryll, X. Zhuge, M. Simson, L. Strüder, K.J. Batenburg, L. Houben, R.E. Dunin-Borkowski, Sci. Rep. 5 (1), 1 (2015).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Hovden, R., Muller, D.A. Electron tomography for functional nanomaterials. MRS Bulletin 45, 298–304 (2020). https://doi.org/10.1557/mrs.2020.87
Published:
Issue Date:
DOI: https://doi.org/10.1557/mrs.2020.87