Abstract
An In0.25Ga0.75Sb/InAs strained-layer superlattice, grown by molecular-beam epitaxy (MBE) on a GaSb[001] substrate, has been characterized by four-circle x-ray diffractometry. This system, proposed by Maliot and Smith for ir detection application, is challenging because of the two group V species and the likelihood of cross-incorporation of the different elements during growth, leading possibly to interdiffusion and thus, to a more diffuse interface. High-resolution x-ray diffraction (XRD) profiles were obtained about several reciprocal lattice points in order to extract a reliable set of structural parameters. The profiles were then successfully modeled by computer simulation. The presence of many sharp higher-order satellite reflections in the XRD profiles is a measure of the high quality of the superlattices. The normal and lateral structural coherence was also measured and will be discussed.
Similar content being viewed by others
References
G. C. Osbourn, J. Appl. Phys. 53, 1586 (1982).
G. C. Osbourn, IEEE J. Quant. Electron QE-22, 1677 (1986).
C. Mailhiot and D. L. Smith, J. Vacuum Sci. Technol. B 5, 1814 (1987).
C. Mailhiot and D. L. Smith, J. Vacuum Sci. Technol. A 7, 445 (1989).
J. Zborowski, W. C. Fan, T.D. Golding, A. Vigliante, P. C. Chow, H.D. Shih, and J.M. Anthony, J. Appl. Phys. 71, 5908 (1992).
W.J. Bartels, J. Hornstra, and D.J. W. Lobeek, Acta Crystallogr. A 42, 539 (1986).
J.M. Vandenberg, S.N.G. Chu, R.A. Hamm, M.B. Panish, and H. Tempkin, Appl. Phys. Lett. 49, 1302 (1986).
W. Sevenhans, M. Giji, Y. Bruynseraede, H. Homma, and I. K. Schuller, Phys. Rev. B 34, 5955 (1986).
B. M. Clemens and J. G. Gay, Phys. Rev. B 35, 9337 (1987).
E. E. Fullerton, I. K. Schuller, H. Vanderstaeten, and Y. Bruynseraede, Phys. Rev. B 45, 9292 (1992).
R. Meyer, M. Hollfelder, H. Hardtdegen, B. Lengeler, and H. Lüth, J. Cryst. Growth 124, 583 (1992).
A. Segmüller and A.E. Blakeslee, J. Appl. Crystallogr. 6, 19 (1973).
D. B. McWhan, M. Gurvitch, J. M. Rowell, and L. R. Walker, J. Appl. Phys. 54, 3886 (1983).
T.D. Golding, H. D. Shih, J. Zborowski, W. C. Fan, P. C. Chow, A. Vigliante, B.C. Covington, A. Chi, J. M. Anthony, and H. F. Schacke, J. Vac. Sci. Technol. B10, 880 (1992).
J. Zborowski, A. Vigliante, S. C. Moss, and T. D. Golding, J. Appl. Phys. 79, 11 (1996).
D. Chrzan and P. Dutta, J. Appl. Phys. 59, 1504 (1986).
S. Hendricks and E. Teller, J. Chem. Phys. 10, 149 (1942).
B. E. Warren, X-ray Diffraction (Dover Publishing Company, New York, 1990).
J.M. Vandenberg, D. Gershoni, R.A. Hamm, M.B. Panish, and H. Temkin, J. Appl. Phys. 66, 3635 (1989).
R. M. Feenstra, D.A. Collins, D. Z.Y. Ting, M.W. Wang, and T.C. McGill, Phys. Rev. Lett. 72, 2749 (1994).
M. Neuberger, Handbook of Electronic Materials (IFI/Plenum, 1971), Vol. 2.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Vigliante, A., Homma, H., Zborowski, J.T. et al. High-resolution x-ray diffraction study of In0.25Ga0.75Sb/InAs superlattice. Journal of Materials Research 14, 1744–1751 (1999). https://doi.org/10.1557/JMR.1999.0236
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1999.0236