Abstract
Nanophase powders of Si, C, and SiC with narrow size distributions are synthesized by dissociating reactants in a dc are plasma and quenching the hot gases in a subsonic nozzle expansion. The plasma is characterized by calorimetric energy balances and the powders by on-line aerosol measurcment techniques and conventional materials analysis. The measured nozzle quench rate is about 5 × 106 K/s. The generated particles have number mean diameters of about 10 nm or less, with Si forming relatively dense, coalesced particles, while SiC forms highly aggregated particles. Our data suggest that SiC particle formation is initiated by the nucleation of small silicon particles.
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R.W. Siegel, Mater. Sci. Eng. A168, 189 (1993).
H. Gleiter, Prog. Mater. Sci. 33, 223 (1989).
G.W. Nieman, J.R. Weertman, and R.W. Siegel, J. Mater. Res. 6, 1012 (1991).
J. Karch, R. Birringer, and H. Gleiter, Nature 330, 556 (1987).
D.D. Beck and R.W. Siegel, J. Mater. Sci. 7, 2840 (1992).
K.J. Klabunde and Y. Tanaka, J. Mol. Catalysis 21, 57 (1983).
R. Rossetti, IL. Ellison, J.M. Gibson, and L.E. Brus, J. Chem. Phys. 80, 4464 (1984).
R. Nagarajan and K. Chattopadhay, Acta Metall. Mater. 42, 947 (1994).
T. Christman and M. Jain, Scripta Metall. et Mater. 25, 767 (1991).
A. Gurav, T. Kodas, T. Pluym, and Y. Xiong, Aerosol Sci. Technol. 19, 411 (1993).
C.G. Granqvist and R.A. Buhrman, J. Appl. Phys. 47, 2200 (1976).
H. Hahn and R.S. Averback, i. Appl. Phys. 67, 1113 (1990).
M.K. Akhtar, S.E. Pratsinis, and S.V. R. Mastrangelo, J. Am. Ceram. Soc. 75, 3408 (1992).
P.C. Kong and E. Pfender, in Plasma Processing and Synthesis of Materials, edited by D. Apelian and J. Szekely (Mater. Res. Soc. Symp. Proc. 98, Pittsburgh, PA, 1987), pp. 377-384.
S.L. Girshick, C-P. Chiu, R. Muno, C.Y. Wu, L. Yang, S. Κ. Singh, and P. H. McMurry, J. Aerosol Sci. 24, 367 (1993).
R. M. Young and E. Pfender, Plasma Chem. Plasma Process. 5, 1 (1985).
J. H. Flint, R.A. Marra, and J. S. Haggerty, Aerosol Sci. Technol. 5, 249 (1986).
S.L. Girshick and C-P. Chiu, Plasma Chem. Plasma Process. 9, 355 (1989).
T. Yoshida, in Combustion and Plasma Synthesis of High Temperature Materials, edited by Z. A. Munir and J. B. Holt (VCH Publishers, New York, 1990), p. 328.
T.T. Kodas and S.K. Friedlander, AIChE J. 34 (4), 551-557 (1988).
N. Rao, S. Girshick, J. Heberlein, P. McMurry, M. Bench, S. Jones, D. Hansen, and B. Micheel, Plasma Chem. Plasma Proc. (1995, in press).
S. C. Wang and R.C. Flagan, Aerosol Sci. Technol. 13, 230 (1990).
J. Fernandez de la Mora, S. V. Hering, N. Rao, and P. H. McMurry, J. Aerosol. Sci. 21, 169 (1990).
B.Y.H. Liu and D.Y.H. Pui, J. Colloid. Interface Sci. 47, 155 (1974).
M. Stolzenburg and P.H. McMurry, Aerosol Sci. Technol. 14, 48 (1991).
A. Weidensohler and H.J. Fissan, Aerosol Sci. Technol. 14, 358 (1991).
A. Reineking and J. Porstendorfer, Aerosol Sci. Technol. 5, 483 (1986).
J. Kesten, A. Reineking, and J. Porstendorfer, Aerosol Sci. Technol. 15, 107 (1991).
W. P. Kelly and P.H. McMurry, Aerosol Sci. Technol. 17, 199 (1992).
S.V. Hering and M. R. Stolzenburg, J. Aerosol Sci. (1994, in press).
S. Kutz and A. Schmidt-Ott, J. Aerosol Sci. 21, S47 (1990).
B.E. Dahneke, J. Aerosol Sci. 4, 147 (1973).
R. Vaben and D. Stover, J. Mater Sci. 29, 3791 (1994).
Y-W. Kim, H.H. Lin, and T.F. Kelly, Acta. Metall. 37, 247 (1989).
G. Lucovsky, J. Non-Cryst. Solids 141, 241 (1992).
W. Koch and S. K. Friedlander, Part. Part. Syst. Charact. 8, 86 (1991).
M.K. Wu, R.S. Windeler, C.K. R. Steiner, T. Bors, and S.K. Friedlander, Aerosol Sci. Technol. 19, 527 (1993).
L.P. Chua and R.A. Antonia, Int. J. Heat Mass Transfer 33, 331 (1990).
C. Greskovich and J. H. Rosolowski, J. Am. Ceram. Soc. 59, 336 (1976).
W.S. Coblenz, J. Mater. Sci. 25, 2754 (1990).
W.M. Robertson, J. Am. Ceram. Soc. 64, 9 (1981).
L.Z. Mezey and J. Griber, Surf. Sci. 117, 220 (1982).
P. Delattre and S.K. Friedlander, Ind. Eng. Chem. Fundam. 17, 189 (1978).
J. D. Hong, M. H. Hon, and R. F. Davis, Mater. Sci. Monogr. 6, 409 (1980).
A.N. Goldstein, C.M. Echer, and A.P. Alivisatos, Science 256, 1425 (1992).
H. R. Baumgartner and B. R. Rossing, Silicon Carbide ‘87, edited by J.D. Cawley and C.E. Semler, Proc. Silicon Carbide 1987 Symposium, Columbus, OH, Aug. 2-5 (1987).
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Rao, N., Micheel, B., Hansen, D. et al. Synthesis of nanophase silicon, carbon, and silicon carbide powders using a plasma expansion process. Journal of Materials Research 10, 2073–2084 (1995). https://doi.org/10.1557/JMR.1995.2073
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DOI: https://doi.org/10.1557/JMR.1995.2073