Abstract
The successful synthesis of high-Tc YBa2Cu3O7 films by means of electron-beam codeposition are reported. Several important growth parameters have been surveyed in a preliminary way. The substrates investigated include Al2O3, ZrO2, MgO, and SrTiO3, The films were characterized by resistivity measurements, x-ray diffraction, microprobe, and Rutherford backscattering analysis. Some TEM and critical current density studies were also carried out. The best results to date have been obtained on SrTiO3 substrates with which polycrystalline epitaxial growth has been achieved. Resistive superconducting transitions with zero resistance at 89.5 K and a 2 K width have been observed in these films.
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J. Bednorz and A. K. Müller, Z. Phys. B 64, 189 (1986).
S. Uchida, H. Takagi, K. Kitazawa, and S. Tanaka, Jpn. J. Appl. Phys. 26, L1 (1987); H. Takagi, S. Uchida, K. Kitazawa, and S. Tanaka, Jpn. J. Appl. Phys. 26, L123 (1987).
M. K. Wu, J. R. Ashburn, C. J. Torng, P. H. Hor, R. L. Meng, L. Gao, Z. J. Huang, Y. Q. Wang, and C. W. Chu, Phys. Rev. Lett. 58, 908 (1987).
R. J. Cava, B. Batlogg, R. B. van Dover, D. W. Murphy, S. Sunshine, T. Siegrist, J. P. Remeika, E. A. Rietman, S. Zahurak, and G. P. Espinosa, Phys. Rev. Lett. 58, 1676 (1987).
R. B. Laibowitz, R. H. Koch, P. Chaudhari, and R. J. Gambino, Phys. Rev. B 35, 882 (1987); P. Chaudhari, R. H. Koch, R. B. Laibowitz, T. R. McGuire, and R. J. Gambino, Phys. Rev. Lett. 58, 2684 (1987).
D. G. Hinks, L. Soderholm, D. W. Capone, II, J. D. Jorgensen, I. K. Schuller, C. U. Segre, K. Zhang, and J. D. Grace, submitted to Appl. Phys. Lett.; S.-J. Hwu, S. N. Song, J. B. Ketterson, T. O. Mason, and K. R. Poeppelmeier, submitted to Commun. Am. Ceramic Soc.
R. H. Hammond, IEEE Trans. Mag. 11, 201 (1975); J. Vac. Sci. Technol. 15, 382 (1978).
The Cu2O, CuO appeared to decompose to Cu and O2 during evaporation, and BaO is extremely hydroscopic.
B. Oh, M. Naito, S. Arnason, P. Rosenthal, M. R. Beasley, T. H. Geballe, R. H. Hammond, and A. Kapitulnik, Appl. Phys. Lett. 51, 852 (1987).
R. H. Hammond, M. Naito, B. Oh, M. Hahn, P. Rosenthal, A. Marshal, N. Missert, M. R. Beasley, A. Kapitulnik, and T. H. Geballe, in the Extended Abstracts for the Materials Research Society Symposium on High-Temperature Superconductors, Anaheim, California, 23, 24 April 1987, p. 169.
The deposition conditions and microprobe compositions of all the films in this paper are shown in the figure caption in the following way: Film No. [substrate temperature Ts, Y source (Y or Y2O3), microprobe composition (Y:Ba:Cu by percentage)].
The apparent interdiffusion seen by RBS in this paper needs to be confirmed by other more thorough analyses. This could include RBS simulation studies, Auger profiles, and SIMS profiles.
The ZrO2 was deposited from a Zr metal source in the presence of an oxygenion flux (0.3 mA/cm2 and 150 V) from an ion gun while the substrates were kept at ambient temperature to avoid columnar growth that would result in a rough surface.
Former “Low-Temperature Group.”
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Naito, M., Hammond, R.H., Oh, B. et al. Thin-film synthesis of the high-Tc oxide superconductor YBa2Cu3O7 by electron-beam codeposition. Journal of Materials Research 2, 713–725 (1987). https://doi.org/10.1557/JMR.1987.0713
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DOI: https://doi.org/10.1557/JMR.1987.0713