Abstract
The lift-off technique is one of the most prevalent methods for fabricating microelectrodes on a flat surface (e.g., a silicon [Si] wafer). It represents an alternative for metaletching techniques that often utilize hazardous chemicals in order to define a pattern. This chapter presents an example of patterning gold electrodes on an Si wafer.
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© 2006 Humana Press Inc.
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Park, B.Y., Zaouk, R., Madou, M.J. (2006). Fabrication of Microelectrodes Using the Lift-Off Technique. In: Minteer, S.D. (eds) Microfluidic Techniques. Methods In Molecular Biology™, vol 321. Humana Press. https://doi.org/10.1385/1-59259-997-4:23
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DOI: https://doi.org/10.1385/1-59259-997-4:23
Publisher Name: Humana Press
Print ISBN: 978-1-58829-517-0
Online ISBN: 978-1-59259-997-4
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