Property Optimization of the Micro-Bolometer Array Designed by Associating Noise Equivalent Temperature Difference and Resistance Equation
We present how to optimize efficiently the performance of micro-bolometer array with design parameters such as active area and channel length, and minimize simultaneously the channel resistance of bolometer array with a minimum channel area and length in a given technology and technology
window. The results demonstrate that the serpentine is very efficient pattern to minimize the channel since it provides a large area or path through which electron or holes conducts as easy as possible, as well as it maintains a relatively large absorption area in a given pixel area. On the
other hand, these approach have also much large effects on the flicker noise reduction because amorphous Si active layer has about 20 M ohm/ which causing an insufficient current level in an array circuits, however, any dopants does not need to reduce resistance of micro-bolometer channel.
Keywords: Infrared Sensor; Micro-Bolometer; NETD
Document Type: Research Article
Affiliations: Department of Global Nanotechnology Development, National NanoFab Center, Daejeon, 34141, Republic of Korea
Publication date: 01 October 2019
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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