Index-Matched Indium Tin Oxide Electrodes for Capacitive Touch Screen Panel Applications
Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (ΔR) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2
thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a ΔR of less than 1% were achieved, along with a low sheet resistance of
90 Ω/□.
Document Type: Research Article
Publication date: 01 November 2013
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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