Fabrication of a High-Throughput Cantilever-Style Aperture Tip by the Use of the Bird's-Beak Effect

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Published 1 July 2003 Copyright (c) 2003 The Japan Society of Applied Physics
, , Citation Ki-Bong Song et al 2003 Jpn. J. Appl. Phys. 42 4353 DOI 10.1143/JJAP.42.4353

1347-4065/42/7R/4353

Abstract

A fabrication technique for a high-throughput cantilever-style aperture tip is described. Using the bird's-beak effect due to the stress caused by Si3N4 film in the field oxidation of silicon, we fabricated a near-field aperture with a diameter of about 100 nm which has a throughput of more than 1000 times that of the pyramidal pit.

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10.1143/JJAP.42.4353