Abstract
Electrically injected, single-longitudinal-mode nonpolar m-plane vertical-cavity surface-emitting lasers (VCSELs) are reported with a room-temperature lasing wavelength of 411.9 nm, a full width at half maximum (FWHM) of 0.25 nm, and a peak output power of 19.5 µW under pulsed conditions. The polarization direction of the VCSELs is consistently oriented along the [1210] a-direction. The degree of polarization increases from 0.13 below threshold to 0.72 above threshold. A process is demonstrated that utilizes bandgap-selective photoelectrochemical (PEC) undercut etching of an intracavity-embedded In0.12Ga0.88N sacrificial layer to achieve precise cavity length control and allow for top and bottom dielectric distributed Bragg reflector (DBR) mirrors.