Abstract
The results of development and studies of humidity-sensitive elements based on a carbon-nanotube bundle are presented. It has been demonstrated that arrays of nanotubes grown by the low-temperature plasma-chemical method on planar silicon structures have exceptional sensitivity to humidity. The ratio of the structure resistance in dry and humid states is more than 105-fold. Such a high relative resistance change is caused by the character of changes in conductivity of the charge carriers between individual tubes of the bundle upon adsorption of water molecules.
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Original Russian Text © S.V. Bulyarskii, A.S. Basaev, A.V. Gal’perin, M.S. Ermakov, A.A. Pavlov, Yu.P. Shaman, 2013, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 39, No. 20, pp. 1–6.
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Bulyarskii, S.V., Basaev, A.S., Gal’perin, A.V. et al. High sensitivity to humidity of an element based on a carbon-nanotube bundle. Tech. Phys. Lett. 39, 887–889 (2013). https://doi.org/10.1134/S1063785013100143
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DOI: https://doi.org/10.1134/S1063785013100143