Abstract
A mathematical model of dc gas discharge plasma has been developed in order to determine the electric field strength at a substrate surface during plasmachemical deposition of carbon nanostructures. A numerical solution of the model equations has been obtained using the experimentally determined boundary conditions and model parameters. A comparison of the solution to experiment confirms the adequacy of the proposed mathematical model, which provides the electric field profiles and the electron and ion density distributions near the substrate surface. Estimations show that, for carbon nanostructures with a characteristic size of about 30 nm, the electric field strength at the surface is sufficiently high to provide for their directional growth along the field.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
S. Fan, M. G. Chapline, N. R. Franklin, et al., Science 283, 512 (1999).
A. N. Obraztsov, I. Yu. Pavlovskiĭ, and A. P. Volkov, Zh. Tekh. Fiz. 127(11), 89 (2001) [Zh. Tekh. Fiz. 46, 1437 (2001)].
A. A. Zolotukhin, A. N. Obraztsov, A. P. Volkov, and A. O. Ustinov, Pis’ma Zh. Tekh. Fiz. 124(9), 58 (2003) [Tech. Phys. Lett. 29, 380 (2003)].
G. M. Mikheev, R. G. Zonov, A. N. Obraztsov, and Yu. P. Svirko, Pis’ma Zh. Tekh. Fiz. 30(17), 88 (2004) [Tech. Phys. Lett. 30, 750 (2004)].
Yu. P. Raizer, Gas Discharge Physics (Nauka, Moscow, 1992; Springer, Berlin, 1991).
E. A. Mason and E. W. McDaniel, Transport Properties of Ions in Gas (Wiley, New York, 1988).
E. A. Mason and J. T. Vanderslice, Phys. Rev. 114, 497 (1959).
G. J. M. Hagelaar, F. J. De Hoog, and G. M. W. Kroesen, Phys. Rev. E 62, 1452 (2000).
H. W. Ellis, R. Y. Pai, E. W. McDaniel, et al., At. Data Nucl. Data Tables 17, 177 (1976).
BOLSIG Boltzmann Solver for the SIGLO-Series 1.0, CPA, Toulouse & Kinema Sotfware, 1996.
L. C. Pitchford, S. V. O’Neil, and J. R. Rumble, Phys. Rev. A 23, 294 (1981).
P. Van Der Donk, F. B. Yousif, J. B. A. Mitchell, and A. P. Hickman, Phys. Rev. Lett. 67, 42 (1991).
FEMLAB Reference Manual (COMSOL AB, Stockholm, 2004).
M. Chhowalla, K. B. K. Teo, C. Ducati, et al., J. Appl. Phys. 90, 5308 (2001).
Author information
Authors and Affiliations
Additional information
Original Russian Text © Al.A. Zakhidov, O.A. Klimenko, I.A. Popov, A.A. Zolotukhin, A.N. Obraztsov, 2007, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2007, Vol. 33, No. 14, pp. 1–9.
Rights and permissions
About this article
Cite this article
Zakhidov, A.A., Klimenko, O.A., Popov, I.A. et al. Effect of electric field on the vapor-phase growth of carbon nanostructures. Tech. Phys. Lett. 33, 586–589 (2007). https://doi.org/10.1134/S1063785007070140
Received:
Issue Date:
DOI: https://doi.org/10.1134/S1063785007070140