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Thermal parameters of layers and interfaces in silicon-on-diamond structures

  • Semiconductors and Dielectrics
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Abstract

The heat propagation at room temperature was studied in a heterostructure consisting of a polycrystalline diamond film deposited from a hydrocarbon plasma on an oriented silicon substrate. The dynamics of cooling of a thin-film indium thermometer evaporated atop the diamond film was measured following its heating by nanosecond nitrogen laser pulses. The experimental data were compared with the values calculated in the framework of the theory of thermal conductivity for multilayer systems. This analysis permitted the determination of both the thermal conductivity of the diamond film and the thermal resistance of the diamond/Si and In/diamond interfaces.

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References

  1. R. MacKenzie, J. J. Lim, S. Bull, S. Sujecki, A. J. Kent, and E. C. Larkins, J. Phys., Conf. Ser. 92, 012068 (2007).

    Google Scholar 

  2. N. K. Annamalai, P. Fechner, and J. Sawyer, in Proceedings of the IEEE International SOI Conference, Ponte Vedra Beach, FL, United States, 1992 (Ponte Vedra Beach, 1992), p. 64.

  3. A. Aleksov, T. X. Li, N. Govindaryaju, J. M. Gobien, S. D. Wolter, J. T. Prater, and A. Sitar, Diamond Relat. Mater. 14, 308 (2005).

    Article  Google Scholar 

  4. Natural Diamonds of Russia, Ed. by V. B. Kvaskov (Polyaron, Moscow, 1997) [in Russian].

    Google Scholar 

  5. E. Kohn and W. Ebert, in Low-Pressure Synthetic Diamond: Manufacturing and Applications, Ed. by B. Dischler and C. Wild (Springer, Berlin, 1998), p. 331.

    Google Scholar 

  6. V. Ral’chenko and V. Konov, Élektron.: Nauka, Tekhnol., Biznes, No. 4, 58 (2007).

  7. Low-Pressure Synthetic Diamond: Manufacturing and Applications, Ed. by B. Dischler and C. Wild (Springer, Berlin, 1998).

    Google Scholar 

  8. E. T. Swartz and R. O. Pohl, Rev. Mod. Phys. 61, 605 (1989).

    Article  ADS  Google Scholar 

  9. A. Lahmar, T. P. Nguyen, D. Sakami, S. Orain, Y. Scudeller, and F. Danes, Thin Solid Films 389, 167 (2001).

    Article  ADS  Google Scholar 

  10. M. N. Touzelbaev and K. E. Goodson, Diamond Relat. Mater. 7(7), 1 (1998).

    Article  Google Scholar 

  11. K. E. Goodson, O. W. Käding, M. Rösler, and R. Zachai, J. Appl. Phys. 77, 1385 (1995).

    Article  ADS  Google Scholar 

  12. H. Verhoeven, E. Boetteger, A. Flöter, H. Reib, and R. Zachai, Diamond Relat. Mater. 6(6), 298 (1997).

    Article  Google Scholar 

  13. V. Ralchenko, T. Galkina, A. Klokov, A. Sharkov, S. Chernook, and V. Martovitsky, in Science and Technology of Semiconductor-on-Insulator Structure and Devices Operating in a Harsh Environment, Ed. by D. Flandre and A. Nazarov (Kluwer, New York, 2005), p. 77.

    Chapter  Google Scholar 

  14. Handbook of Physical Quantities, Ed. by I. S. Grigoriev and E. Z. Meilikov (Énergoatomizdat, Moscow, 1991; CRC Press, Boca Raton, FL, United States, 1996).

    Google Scholar 

  15. A. V. Sukhadolau, E. V. Ivakin, V. G. Ralchenko, A. V. Khomich, A. V. Vlasov, and A. F. Popovich, Diamond Relat. Mater. 14, 589 (2005).

    Article  Google Scholar 

  16. H. S. Carlslaw and J. C. Jaeger, Conduction of Heat in Solids (Clarendon Oxford, 1947; GITTL, Moscow, 1947).

  17. J. E. Graebner, Diamond Relat. Mater. 5, 1366 (1996).

    Article  Google Scholar 

  18. T. I. Galkina, D. F. Aminev, A. Yu. Klokov, A. I. Sharkov, and V. G. Ral’chenko, in Abstracts of Papers of the Eighth Russian Conference on Physics of Semiconductors, Yekaterinburg, Russia, 2007 (Institute of Metal Physics, Ural Division, Russian Academy of Sciences, Yekaterinburg, 2007), p. 420.

    Google Scholar 

  19. R. J. Stoner and H. J. Maris, Phys. Rev. B: Condens. Matter 48, 16373 (1993).

    Google Scholar 

  20. D. G. Cahill, K. Goodson, and A. Majumdar, J. Heat Transfer 124, 223 (2002).

    Article  Google Scholar 

  21. L. C. Nistor, J. Van Landuyt, V. G. Ralchenko, A. A. Smolin, K. G. Korotushenko, and E. D. Obraztsova. J. Mater. Res. 12, 2533 (1997).

    Article  ADS  Google Scholar 

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Correspondence to A. I. Sharkov.

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Original Russian Text © A.Yu. Klokov, D.F. Aminev, A.I. Sharkov, V.G. Ral’chenko, T.I. Galkina, 2008, published in Fizika Tverdogo Tela, 2008, Vol. 50, No. 12, pp. 2167–2173.

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Klokov, A.Y., Aminev, D.F., Sharkov, A.I. et al. Thermal parameters of layers and interfaces in silicon-on-diamond structures. Phys. Solid State 50, 2263–2269 (2008). https://doi.org/10.1134/S1063783408120068

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  • DOI: https://doi.org/10.1134/S1063783408120068

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