Abstract
It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.
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Original Russian Text © D.G. Gromov, S.V. Dubkov, A.A. Pavlov, S.N. Skorik, A.Yu. Trifonov, E.P. Kirilenko, A.S. Shulyat’ev, Yu.P. Shaman, B.N. Rygalin, 2016, published in Izvestiya vysshikh uchebnykh zavedenii. Elektronika, 2016, Vol. 21, No. 1, pp. 48–54.
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Gromov, D.G., Dubkov, S.V., Pavlov, A.A. et al. Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition. Semiconductors 50, 1748–1752 (2016). https://doi.org/10.1134/S1063782616130042
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DOI: https://doi.org/10.1134/S1063782616130042