Abstract
The dynamics of the ion energy spectrum in low-pressure (10–100 Pa) hydrogen plasma induced by extreme ultraviolet (EUV) pulses in the wavelength range of 10–20 nm was studied experimentally. The plasma was generated under cathode irradiation due to both direct gas ionization by EUV photons and impact ionization by high-energy secondary electrons. The dynamics of the spectra of ions incident on the cathode was measured using a time-resolved retarding field energy analyzer. It is shown that the ion spectrum dynamics is completely determined by the time evolution of the cathode sheath. At low gas pressures (<20 Pa), the ion spectrum at early moments after the EUV pulse has a peaked shape, typical of a collisionless plasma sheath, and is mainly determined by the cathode voltage. As the pressure increases, the peak broadens and low energy ions appear in the spectrum due to ion collisions in the cathode sheath. An increase in the role of collisions with decreasing plasma density is also observed in the time evolution of ion spectra.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
P. J. Silverman, J. Microlith. Microfab. Microsys. 4, 0111006 (2005).
E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, Prog. Surf. Sci. 86, 255 (2011).
A. S. Kuznetsov, M. A. Gleeson, and F. Bijkerk, J. Phys. Condens. Matter 24, 052203 (2012).
K. Boller, R. P. Haelbich, H. Hogrefe, W. Jark, and C. Kunz, Nucl. Instrum. Meth. Phys. Res. 208, 273 (1983).
T. E. Madey, N. S. Faradzhev, B. V. Yakshinskiy, and N. V. Edwards, Appl. Surf. Sci. 253, 1691 (2006).
A. Dolgov, D. Lopaev, T. Rachimova, A. Kovalev, A. Vasil’eva, V. M. Krivtsun, O. Yakushev, C. J. Lee, and F. Bijkerk, J. Phys. D 47, 065205 (2014).
R. M. Horst, J. Beckers, E. A. Osorio, and V. Banine, J. Phys. D 48, 432001 (2015).
R. M. Horst, J. Beckers, E. A. Osorio, and V. Banine, J. Phys. D 48, 285203 (2015).
A. Dolgov, O. Yakushev, A. Abrikosov, E. Snegirev, V. M. Krivtsun, C. J. Lee, and F. Bijkerk, Plasma Sources Sci. Technol. 24, 35003 (2015).
D. Gahan, B. Dolinaj, C. Hayden, and M. B. Hopkins, Plasma Process. Polym. 6, 643 (2009).
V. Y. Banine, K. N. Koshelev, and G. H. P. M. Swinkels, J. Phys. D 44, 253001 (2011).
M. S. Bibishkin, N. I. Chkhalo, S. A. Gusev, E. B. Kluenkov, A. Y. Lopatin, V. I. Luchin, A. E. Pestov, N. N. Salashchenko, L. A. Shmaenok, N. N. Tsybin, and S. Yu. Zuev, Proc. SPIE 7025, 702502 (2008).
M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 2005).
J. Glosik, Int. J. Mass Spectrom. Ion Process. 139, 15 (1994).
A. V. Phelps, J. Phys. Chem. Ref. Data 19, 653 (1990).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.A. Abrikosov, O.F. Yakushev, D.V. Lopaev, V.M. Krivtsun, 2017, published in Fizika Plazmy, 2017, Vol. 43, No. 6, pp. 513–520.
Rights and permissions
About this article
Cite this article
Abrikosov, A.A., Yakushev, O.F., Lopaev, D.V. et al. Dynamics of the ion energy spectrum in EUV-induced hydrogen plasma. Plasma Phys. Rep. 43, 614–620 (2017). https://doi.org/10.1134/S1063780X17060010
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063780X17060010