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Magnetron Plasma Sputter Deposited W-Layers Permeability Influence on the Cycling Stability of thin Film Electrochromic Modules

  • GAS DISCHARGE AND PLASMA PHYSICS
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Abstract

The processes of thin film electrochromic modules degradation during their cycling through the formation of blisters within the PVD sputtered tungsten oxide electrode layers are considered. The formation of blisters is shown to be caused by the retention of radical components transported into the tungsten films from the underneath layers of the module’s layerstack. Permeability of the ceramic tungsten-oxide layers of varying stoichiometry is studied by the means of thermal desorption spectroscopy and the ways for increasing the cycling sustainability of tungsten layers through their reactive magnetron PVD in deficiency of reactive component of working gas mixture are proposed.

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ACKNOWLEDGMENTS

The authors thank Dr. Yu. Gasparyan and V. Efimov, National Research Nuclear University MEPhI, for carrying out TDS analysis.

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Authors and Affiliations

  1. “Octoglass” JSC, 123112, Moscow, Russia

    V. V. Kravchenko, D. P. Knyazhev & D. D. Bernt

  2. National Research Nuclear University MEPhI, 115409, Moscow, Russia

    D. D. Bernt & A. A. Pisarev

Authors
  1. V. V. Kravchenko
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  2. D. P. Knyazhev
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  3. D. D. Bernt
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  4. A. A. Pisarev
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Correspondence to V. V. Kravchenko.

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Kravchenko, V.V., Knyazhev, D.P., Bernt, D.D. et al. Magnetron Plasma Sputter Deposited W-Layers Permeability Influence on the Cycling Stability of thin Film Electrochromic Modules. Phys. Atom. Nuclei 84, 1770–1775 (2021). https://doi.org/10.1134/S1063778821090234

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  • DOI: https://doi.org/10.1134/S1063778821090234

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